12/7/2011	11:55:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2011	11:55:38 AM	Recipe started at 11:55 AM
12/7/2011	11:55:38 AM	Helium valve closed
12/7/2011	11:55:38 AM	H2 valve closed
12/7/2011	11:55:38 AM	BCl3 valve closed
12/7/2011	11:55:38 AM	PH3 valve closed
12/7/2011	11:55:38 AM	SiCl4 pre valve closed
12/7/2011	11:55:38 AM	SiCl4 post valve closed
12/7/2011	11:55:38 AM	Main Vac valve closed
12/7/2011	11:55:38 AM	Bypass valve closed
12/7/2011	11:55:38 AM	Bubbler valve closed
12/7/2011	11:55:38 AM	Helium MFC set to  0.000000
12/7/2011	11:55:38 AM	H2 MFC set to  0.000000
12/7/2011	11:55:38 AM	BCl3 MFC set to  0.000000
12/7/2011	11:55:38 AM	PHl3 MFC set to  0.000000
12/7/2011	11:55:38 AM	SiCl4 MFC set to  0.000000
12/7/2011	11:55:38 AM	Bypass solenoid MFC set to  0.000000
12/7/2011	11:55:39 AM	Tube furnace set to 0
12/7/2011	11:55:42 AM	H2 valve closed
12/7/2011	11:55:42 AM	BCl3 valve closed
12/7/2011	11:55:42 AM	PH3 valve closed
12/7/2011	11:55:42 AM	SiCl4 pre valve closed
12/7/2011	11:55:42 AM	SiCl4 post valve closed
12/7/2011	11:55:42 AM	Main Vac valve closed
12/7/2011	11:55:42 AM	Bypass valve closed
12/7/2011	11:55:42 AM	Bubbler valve closed
12/7/2011	11:55:42 AM	Helium valve opened
12/7/2011	11:55:42 AM	Helium MFC set to  500.000000
12/7/2011	11:55:42 AM	H2 MFC set to  0.000000
12/7/2011	11:55:42 AM	BCl3 MFC set to  0.000000
12/7/2011	11:55:42 AM	PHl3 MFC set to  0.000000
12/7/2011	11:55:42 AM	SiCl4 MFC set to  0.000000
12/7/2011	11:55:42 AM	Bypass solenoid MFC set to  0.000000
12/7/2011	11:55:42 AM	Tube furnace set to 0
12/7/2011	11:56:47 AM	Helium valve closed
12/7/2011	11:56:47 AM	H2 valve closed
12/7/2011	11:56:47 AM	BCl3 valve closed
12/7/2011	11:56:47 AM	PH3 valve closed
12/7/2011	11:56:47 AM	SiCl4 pre valve closed
12/7/2011	11:56:47 AM	SiCl4 post valve closed
12/7/2011	11:56:47 AM	Main Vac valve closed
12/7/2011	11:56:47 AM	Bypass valve closed
12/7/2011	11:56:47 AM	Bubbler valve closed
12/7/2011	11:56:47 AM	Helium MFC set to  0.000000
12/7/2011	11:56:47 AM	H2 MFC set to  0.000000
12/7/2011	11:56:47 AM	BCl3 MFC set to  0.000000
12/7/2011	11:56:47 AM	PHl3 MFC set to  0.000000
12/7/2011	11:56:47 AM	SiCl4 MFC set to  0.000000
12/7/2011	11:56:47 AM	Bypass solenoid MFC set to  0.000000
12/7/2011	11:56:47 AM	Tube furnace set to 0
12/7/2011	11:56:48 AM	Run finished at 11:56 AM
12/7/2011	11:56:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2011	12:00:34 PM	Bypass valve opened
12/7/2011	12:01:52 PM	Bypass valve closed
12/7/2011	12:01:53 PM	Main Vac valve opened
12/7/2011	12:04:52 PM	Recipe started at 12:04 PM
12/7/2011	12:04:52 PM	Helium valve closed
12/7/2011	12:04:52 PM	H2 valve closed
12/7/2011	12:04:52 PM	BCl3 valve closed
12/7/2011	12:04:52 PM	PH3 valve closed
12/7/2011	12:04:52 PM	SiCl4 pre valve closed
12/7/2011	12:04:52 PM	SiCl4 post valve closed
12/7/2011	12:04:52 PM	Bypass valve closed
12/7/2011	12:04:52 PM	Bubbler valve closed
12/7/2011	12:04:52 PM	Main Vac valve opened
12/7/2011	12:04:52 PM	Helium MFC set to  0.000000
12/7/2011	12:04:52 PM	H2 MFC set to  0.000000
12/7/2011	12:04:52 PM	BCl3 MFC set to  0.000000
12/7/2011	12:04:52 PM	PHl3 MFC set to  0.000000
12/7/2011	12:04:52 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:04:52 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:04:52 PM	Tube furnace set to 150
12/7/2011	12:05:22 PM	H2 valve closed
12/7/2011	12:05:22 PM	BCl3 valve closed
12/7/2011	12:05:22 PM	PH3 valve closed
12/7/2011	12:05:22 PM	SiCl4 pre valve closed
12/7/2011	12:05:22 PM	SiCl4 post valve closed
12/7/2011	12:05:22 PM	Bypass valve closed
12/7/2011	12:05:22 PM	Bubbler valve closed
12/7/2011	12:05:22 PM	Helium valve opened
12/7/2011	12:05:22 PM	Main Vac valve opened
12/7/2011	12:05:22 PM	Helium MFC set to  20.000000
12/7/2011	12:05:22 PM	H2 MFC set to  0.000000
12/7/2011	12:05:22 PM	BCl3 MFC set to  0.000000
12/7/2011	12:05:22 PM	PHl3 MFC set to  0.000000
12/7/2011	12:05:22 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:05:22 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:05:22 PM	Tube furnace set to 150
12/7/2011	12:05:52 PM	Helium valve closed
12/7/2011	12:05:52 PM	H2 valve closed
12/7/2011	12:05:52 PM	BCl3 valve closed
12/7/2011	12:05:52 PM	PH3 valve closed
12/7/2011	12:05:52 PM	SiCl4 pre valve closed
12/7/2011	12:05:52 PM	SiCl4 post valve closed
12/7/2011	12:05:52 PM	Bypass valve closed
12/7/2011	12:05:52 PM	Bubbler valve closed
12/7/2011	12:05:52 PM	Main Vac valve opened
12/7/2011	12:05:52 PM	Helium MFC set to  0.000000
12/7/2011	12:05:52 PM	H2 MFC set to  0.000000
12/7/2011	12:05:52 PM	BCl3 MFC set to  0.000000
12/7/2011	12:05:52 PM	PHl3 MFC set to  0.000000
12/7/2011	12:05:52 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:05:52 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:05:52 PM	Tube furnace set to 150
12/7/2011	12:06:22 PM	H2 valve closed
12/7/2011	12:06:22 PM	BCl3 valve closed
12/7/2011	12:06:22 PM	PH3 valve closed
12/7/2011	12:06:22 PM	SiCl4 pre valve closed
12/7/2011	12:06:22 PM	SiCl4 post valve closed
12/7/2011	12:06:22 PM	Bypass valve closed
12/7/2011	12:06:22 PM	Bubbler valve closed
12/7/2011	12:06:22 PM	Helium valve opened
12/7/2011	12:06:22 PM	Main Vac valve opened
12/7/2011	12:06:22 PM	Helium MFC set to  20.000000
12/7/2011	12:06:22 PM	H2 MFC set to  0.000000
12/7/2011	12:06:22 PM	BCl3 MFC set to  0.000000
12/7/2011	12:06:22 PM	PHl3 MFC set to  0.000000
12/7/2011	12:06:22 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:06:22 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:06:23 PM	Tube furnace set to 150
12/7/2011	12:06:53 PM	Helium valve closed
12/7/2011	12:06:53 PM	H2 valve closed
12/7/2011	12:06:53 PM	BCl3 valve closed
12/7/2011	12:06:53 PM	PH3 valve closed
12/7/2011	12:06:53 PM	SiCl4 pre valve closed
12/7/2011	12:06:53 PM	SiCl4 post valve closed
12/7/2011	12:06:53 PM	Bypass valve closed
12/7/2011	12:06:53 PM	Bubbler valve closed
12/7/2011	12:06:53 PM	Main Vac valve opened
12/7/2011	12:06:53 PM	Helium MFC set to  0.000000
12/7/2011	12:06:53 PM	H2 MFC set to  0.000000
12/7/2011	12:06:53 PM	BCl3 MFC set to  0.000000
12/7/2011	12:06:53 PM	PHl3 MFC set to  0.000000
12/7/2011	12:06:53 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:06:53 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:06:53 PM	Tube furnace set to 150
12/7/2011	12:07:23 PM	H2 valve closed
12/7/2011	12:07:23 PM	BCl3 valve closed
12/7/2011	12:07:23 PM	PH3 valve closed
12/7/2011	12:07:23 PM	SiCl4 pre valve closed
12/7/2011	12:07:23 PM	SiCl4 post valve closed
12/7/2011	12:07:23 PM	Bypass valve closed
12/7/2011	12:07:23 PM	Bubbler valve closed
12/7/2011	12:07:23 PM	Helium valve opened
12/7/2011	12:07:23 PM	Main Vac valve opened
12/7/2011	12:07:23 PM	Helium MFC set to  20.000000
12/7/2011	12:07:23 PM	H2 MFC set to  0.000000
12/7/2011	12:07:23 PM	BCl3 MFC set to  0.000000
12/7/2011	12:07:23 PM	PHl3 MFC set to  0.000000
12/7/2011	12:07:23 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:07:23 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:07:23 PM	Tube furnace set to 150
12/7/2011	12:07:53 PM	Helium valve closed
12/7/2011	12:07:53 PM	H2 valve closed
12/7/2011	12:07:53 PM	BCl3 valve closed
12/7/2011	12:07:53 PM	PH3 valve closed
12/7/2011	12:07:53 PM	SiCl4 pre valve closed
12/7/2011	12:07:53 PM	SiCl4 post valve closed
12/7/2011	12:07:53 PM	Bypass valve closed
12/7/2011	12:07:53 PM	Bubbler valve closed
12/7/2011	12:07:53 PM	Main Vac valve opened
12/7/2011	12:07:53 PM	Helium MFC set to  0.000000
12/7/2011	12:07:53 PM	H2 MFC set to  0.000000
12/7/2011	12:07:53 PM	BCl3 MFC set to  0.000000
12/7/2011	12:07:53 PM	PHl3 MFC set to  0.000000
12/7/2011	12:07:53 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:07:53 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:07:53 PM	Tube furnace set to 150
12/7/2011	12:08:23 PM	H2 valve closed
12/7/2011	12:08:23 PM	BCl3 valve closed
12/7/2011	12:08:23 PM	PH3 valve closed
12/7/2011	12:08:23 PM	SiCl4 pre valve closed
12/7/2011	12:08:23 PM	SiCl4 post valve closed
12/7/2011	12:08:23 PM	Bypass valve closed
12/7/2011	12:08:23 PM	Bubbler valve closed
12/7/2011	12:08:23 PM	Helium valve opened
12/7/2011	12:08:23 PM	Main Vac valve opened
12/7/2011	12:08:23 PM	Helium MFC set to  20.000000
12/7/2011	12:08:23 PM	H2 MFC set to  0.000000
12/7/2011	12:08:23 PM	BCl3 MFC set to  0.000000
12/7/2011	12:08:23 PM	PHl3 MFC set to  0.000000
12/7/2011	12:08:23 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:08:23 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:08:23 PM	Tube furnace set to 150
12/7/2011	12:08:53 PM	Helium valve closed
12/7/2011	12:08:53 PM	H2 valve closed
12/7/2011	12:08:53 PM	BCl3 valve closed
12/7/2011	12:08:53 PM	PH3 valve closed
12/7/2011	12:08:53 PM	SiCl4 pre valve closed
12/7/2011	12:08:53 PM	SiCl4 post valve closed
12/7/2011	12:08:53 PM	Bypass valve closed
12/7/2011	12:08:53 PM	Bubbler valve closed
12/7/2011	12:08:53 PM	Main Vac valve opened
12/7/2011	12:08:53 PM	Helium MFC set to  0.000000
12/7/2011	12:08:53 PM	H2 MFC set to  0.000000
12/7/2011	12:08:53 PM	BCl3 MFC set to  0.000000
12/7/2011	12:08:53 PM	PHl3 MFC set to  0.000000
12/7/2011	12:08:53 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:08:53 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:08:54 PM	Tube furnace set to 150
12/7/2011	12:09:24 PM	H2 valve closed
12/7/2011	12:09:24 PM	BCl3 valve closed
12/7/2011	12:09:24 PM	PH3 valve closed
12/7/2011	12:09:24 PM	SiCl4 pre valve closed
12/7/2011	12:09:24 PM	SiCl4 post valve closed
12/7/2011	12:09:24 PM	Bypass valve closed
12/7/2011	12:09:24 PM	Bubbler valve closed
12/7/2011	12:09:24 PM	Helium valve opened
12/7/2011	12:09:24 PM	Main Vac valve opened
12/7/2011	12:09:24 PM	Helium MFC set to  20.000000
12/7/2011	12:09:24 PM	H2 MFC set to  0.000000
12/7/2011	12:09:24 PM	BCl3 MFC set to  0.000000
12/7/2011	12:09:24 PM	PHl3 MFC set to  0.000000
12/7/2011	12:09:24 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:09:24 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:09:24 PM	Tube furnace set to 150
12/7/2011	12:09:54 PM	Helium valve closed
12/7/2011	12:09:54 PM	H2 valve closed
12/7/2011	12:09:54 PM	BCl3 valve closed
12/7/2011	12:09:54 PM	PH3 valve closed
12/7/2011	12:09:54 PM	SiCl4 pre valve closed
12/7/2011	12:09:54 PM	SiCl4 post valve closed
12/7/2011	12:09:54 PM	Bypass valve closed
12/7/2011	12:09:54 PM	Bubbler valve closed
12/7/2011	12:09:54 PM	Main Vac valve opened
12/7/2011	12:09:54 PM	Helium MFC set to  0.000000
12/7/2011	12:09:54 PM	H2 MFC set to  0.000000
12/7/2011	12:09:54 PM	BCl3 MFC set to  0.000000
12/7/2011	12:09:54 PM	PHl3 MFC set to  0.000000
12/7/2011	12:09:54 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:09:54 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:09:54 PM	Tube furnace set to 150
12/7/2011	12:10:24 PM	H2 valve closed
12/7/2011	12:10:24 PM	BCl3 valve closed
12/7/2011	12:10:24 PM	PH3 valve closed
12/7/2011	12:10:24 PM	SiCl4 pre valve closed
12/7/2011	12:10:24 PM	SiCl4 post valve closed
12/7/2011	12:10:24 PM	Bypass valve closed
12/7/2011	12:10:24 PM	Bubbler valve closed
12/7/2011	12:10:24 PM	Helium valve opened
12/7/2011	12:10:24 PM	Main Vac valve opened
12/7/2011	12:10:24 PM	Helium MFC set to  20.000000
12/7/2011	12:10:24 PM	H2 MFC set to  0.000000
12/7/2011	12:10:24 PM	BCl3 MFC set to  0.000000
12/7/2011	12:10:24 PM	PHl3 MFC set to  0.000000
12/7/2011	12:10:24 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:10:24 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:10:24 PM	Tube furnace set to 150
12/7/2011	12:10:54 PM	Helium valve closed
12/7/2011	12:10:54 PM	H2 valve closed
12/7/2011	12:10:54 PM	BCl3 valve closed
12/7/2011	12:10:54 PM	PH3 valve closed
12/7/2011	12:10:54 PM	SiCl4 pre valve closed
12/7/2011	12:10:54 PM	SiCl4 post valve closed
12/7/2011	12:10:54 PM	Bypass valve closed
12/7/2011	12:10:54 PM	Bubbler valve closed
12/7/2011	12:10:54 PM	Main Vac valve opened
12/7/2011	12:10:54 PM	Helium MFC set to  0.000000
12/7/2011	12:10:54 PM	H2 MFC set to  0.000000
12/7/2011	12:10:54 PM	BCl3 MFC set to  0.000000
12/7/2011	12:10:54 PM	PHl3 MFC set to  0.000000
12/7/2011	12:10:54 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:10:54 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:10:54 PM	Tube furnace set to 150
12/7/2011	12:11:25 PM	H2 valve closed
12/7/2011	12:11:25 PM	BCl3 valve closed
12/7/2011	12:11:25 PM	PH3 valve closed
12/7/2011	12:11:25 PM	SiCl4 pre valve closed
12/7/2011	12:11:25 PM	SiCl4 post valve closed
12/7/2011	12:11:25 PM	Bypass valve closed
12/7/2011	12:11:25 PM	Bubbler valve closed
12/7/2011	12:11:25 PM	Helium valve opened
12/7/2011	12:11:25 PM	Main Vac valve opened
12/7/2011	12:11:25 PM	Helium MFC set to  20.000000
12/7/2011	12:11:25 PM	H2 MFC set to  0.000000
12/7/2011	12:11:25 PM	BCl3 MFC set to  0.000000
12/7/2011	12:11:25 PM	PHl3 MFC set to  0.000000
12/7/2011	12:11:25 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:11:25 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:11:25 PM	Tube furnace set to 150
12/7/2011	12:11:55 PM	Helium valve closed
12/7/2011	12:11:55 PM	H2 valve closed
12/7/2011	12:11:55 PM	BCl3 valve closed
12/7/2011	12:11:55 PM	PH3 valve closed
12/7/2011	12:11:55 PM	SiCl4 pre valve closed
12/7/2011	12:11:55 PM	SiCl4 post valve closed
12/7/2011	12:11:55 PM	Bypass valve closed
12/7/2011	12:11:55 PM	Bubbler valve closed
12/7/2011	12:11:55 PM	Main Vac valve opened
12/7/2011	12:11:55 PM	Helium MFC set to  0.000000
12/7/2011	12:11:55 PM	H2 MFC set to  0.000000
12/7/2011	12:11:55 PM	BCl3 MFC set to  0.000000
12/7/2011	12:11:55 PM	PHl3 MFC set to  0.000000
12/7/2011	12:11:55 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:11:55 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:11:55 PM	Tube furnace set to 150
12/7/2011	12:12:25 PM	H2 valve closed
12/7/2011	12:12:25 PM	BCl3 valve closed
12/7/2011	12:12:25 PM	PH3 valve closed
12/7/2011	12:12:25 PM	SiCl4 pre valve closed
12/7/2011	12:12:25 PM	SiCl4 post valve closed
12/7/2011	12:12:25 PM	Bypass valve closed
12/7/2011	12:12:25 PM	Bubbler valve closed
12/7/2011	12:12:25 PM	Helium valve opened
12/7/2011	12:12:25 PM	Main Vac valve opened
12/7/2011	12:12:25 PM	Helium MFC set to  20.000000
12/7/2011	12:12:25 PM	H2 MFC set to  0.000000
12/7/2011	12:12:25 PM	BCl3 MFC set to  0.000000
12/7/2011	12:12:25 PM	PHl3 MFC set to  0.000000
12/7/2011	12:12:25 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:12:25 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:12:25 PM	Tube furnace set to 150
12/7/2011	12:12:55 PM	Helium valve closed
12/7/2011	12:12:55 PM	H2 valve closed
12/7/2011	12:12:55 PM	BCl3 valve closed
12/7/2011	12:12:55 PM	PH3 valve closed
12/7/2011	12:12:55 PM	SiCl4 pre valve closed
12/7/2011	12:12:55 PM	SiCl4 post valve closed
12/7/2011	12:12:55 PM	Bypass valve closed
12/7/2011	12:12:55 PM	Bubbler valve closed
12/7/2011	12:12:55 PM	Main Vac valve opened
12/7/2011	12:12:55 PM	Helium MFC set to  0.000000
12/7/2011	12:12:55 PM	H2 MFC set to  0.000000
12/7/2011	12:12:55 PM	BCl3 MFC set to  0.000000
12/7/2011	12:12:55 PM	PHl3 MFC set to  0.000000
12/7/2011	12:12:55 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:12:55 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:12:55 PM	Tube furnace set to 150
12/7/2011	12:13:25 PM	H2 valve closed
12/7/2011	12:13:25 PM	BCl3 valve closed
12/7/2011	12:13:25 PM	PH3 valve closed
12/7/2011	12:13:25 PM	SiCl4 pre valve closed
12/7/2011	12:13:25 PM	SiCl4 post valve closed
12/7/2011	12:13:25 PM	Bypass valve closed
12/7/2011	12:13:25 PM	Bubbler valve closed
12/7/2011	12:13:25 PM	Helium valve opened
12/7/2011	12:13:25 PM	Main Vac valve opened
12/7/2011	12:13:25 PM	Helium MFC set to  20.000000
12/7/2011	12:13:25 PM	H2 MFC set to  0.000000
12/7/2011	12:13:25 PM	BCl3 MFC set to  0.000000
12/7/2011	12:13:25 PM	PHl3 MFC set to  0.000000
12/7/2011	12:13:25 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:13:25 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:13:26 PM	Tube furnace set to 150
12/7/2011	12:13:56 PM	Helium valve closed
12/7/2011	12:13:56 PM	H2 valve closed
12/7/2011	12:13:56 PM	BCl3 valve closed
12/7/2011	12:13:56 PM	PH3 valve closed
12/7/2011	12:13:56 PM	SiCl4 pre valve closed
12/7/2011	12:13:56 PM	SiCl4 post valve closed
12/7/2011	12:13:56 PM	Bypass valve closed
12/7/2011	12:13:56 PM	Bubbler valve closed
12/7/2011	12:13:56 PM	Main Vac valve opened
12/7/2011	12:13:56 PM	Helium MFC set to  0.000000
12/7/2011	12:13:56 PM	H2 MFC set to  0.000000
12/7/2011	12:13:56 PM	BCl3 MFC set to  0.000000
12/7/2011	12:13:56 PM	PHl3 MFC set to  0.000000
12/7/2011	12:13:56 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:13:56 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:13:56 PM	Tube furnace set to 150
12/7/2011	12:14:26 PM	H2 valve closed
12/7/2011	12:14:26 PM	BCl3 valve closed
12/7/2011	12:14:26 PM	PH3 valve closed
12/7/2011	12:14:26 PM	SiCl4 pre valve closed
12/7/2011	12:14:26 PM	SiCl4 post valve closed
12/7/2011	12:14:26 PM	Bypass valve closed
12/7/2011	12:14:26 PM	Bubbler valve closed
12/7/2011	12:14:26 PM	Helium valve opened
12/7/2011	12:14:26 PM	Main Vac valve opened
12/7/2011	12:14:26 PM	Helium MFC set to  20.000000
12/7/2011	12:14:26 PM	H2 MFC set to  0.000000
12/7/2011	12:14:26 PM	BCl3 MFC set to  0.000000
12/7/2011	12:14:26 PM	PHl3 MFC set to  0.000000
12/7/2011	12:14:26 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:14:26 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:14:26 PM	Tube furnace set to 150
12/7/2011	12:14:56 PM	Helium valve closed
12/7/2011	12:14:56 PM	H2 valve closed
12/7/2011	12:14:56 PM	BCl3 valve closed
12/7/2011	12:14:56 PM	PH3 valve closed
12/7/2011	12:14:56 PM	SiCl4 pre valve closed
12/7/2011	12:14:56 PM	SiCl4 post valve closed
12/7/2011	12:14:56 PM	Bypass valve closed
12/7/2011	12:14:56 PM	Bubbler valve closed
12/7/2011	12:14:56 PM	Main Vac valve opened
12/7/2011	12:14:56 PM	Helium MFC set to  0.000000
12/7/2011	12:14:56 PM	H2 MFC set to  0.000000
12/7/2011	12:14:56 PM	BCl3 MFC set to  0.000000
12/7/2011	12:14:56 PM	PHl3 MFC set to  0.000000
12/7/2011	12:14:56 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:14:56 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:14:56 PM	Tube furnace set to 150
12/7/2011	12:14:57 PM	Run finished at 12:14 PM
12/7/2011	12:50:05 PM	Main Vac valve closed
12/7/2011	12:50:15 PM	Main Vac valve opened
12/7/2011	12:51:27 PM	Recipe started at 12:51 PM
12/7/2011	12:51:27 PM	Helium valve closed
12/7/2011	12:51:27 PM	H2 valve closed
12/7/2011	12:51:27 PM	BCl3 valve closed
12/7/2011	12:51:27 PM	PH3 valve closed
12/7/2011	12:51:27 PM	SiCl4 pre valve closed
12/7/2011	12:51:27 PM	SiCl4 post valve closed
12/7/2011	12:51:27 PM	Main Vac valve closed
12/7/2011	12:51:27 PM	Bypass valve closed
12/7/2011	12:51:27 PM	Bubbler valve closed
12/7/2011	12:51:27 PM	Helium MFC set to  0.000000
12/7/2011	12:51:27 PM	H2 MFC set to  0.000000
12/7/2011	12:51:27 PM	BCl3 MFC set to  0.000000
12/7/2011	12:51:27 PM	PHl3 MFC set to  0.000000
12/7/2011	12:51:27 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:51:27 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:51:27 PM	Tube furnace set to 0
12/7/2011	12:51:30 PM	Helium valve closed
12/7/2011	12:51:30 PM	BCl3 valve closed
12/7/2011	12:51:30 PM	PH3 valve closed
12/7/2011	12:51:30 PM	SiCl4 pre valve closed
12/7/2011	12:51:30 PM	SiCl4 post valve closed
12/7/2011	12:51:30 PM	Main Vac valve closed
12/7/2011	12:51:30 PM	Bypass valve closed
12/7/2011	12:51:30 PM	Bubbler valve closed
12/7/2011	12:51:30 PM	H2 valve opened
12/7/2011	12:51:30 PM	Helium MFC set to  0.000000
12/7/2011	12:51:30 PM	H2 MFC set to  500.000000
12/7/2011	12:51:30 PM	BCl3 MFC set to  0.000000
12/7/2011	12:51:30 PM	PHl3 MFC set to  0.000000
12/7/2011	12:51:30 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:51:30 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:51:31 PM	Tube furnace set to 50
12/7/2011	12:52:34 PM	Helium valve closed
12/7/2011	12:52:34 PM	BCl3 valve closed
12/7/2011	12:52:34 PM	PH3 valve closed
12/7/2011	12:52:34 PM	SiCl4 pre valve closed
12/7/2011	12:52:34 PM	SiCl4 post valve closed
12/7/2011	12:52:34 PM	Main Vac valve closed
12/7/2011	12:52:34 PM	Bypass valve closed
12/7/2011	12:52:34 PM	H2 valve opened
12/7/2011	12:52:34 PM	Bubbler valve opened
12/7/2011	12:52:34 PM	Helium MFC set to  0.000000
12/7/2011	12:52:34 PM	H2 MFC set to  500.000000
12/7/2011	12:52:34 PM	BCl3 MFC set to  0.000000
12/7/2011	12:52:34 PM	PHl3 MFC set to  0.000000
12/7/2011	12:52:34 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:52:34 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:52:35 PM	Tube furnace set to 50
12/7/2011	12:52:36 PM	Helium valve closed
12/7/2011	12:52:36 PM	BCl3 valve closed
12/7/2011	12:52:36 PM	PH3 valve closed
12/7/2011	12:52:36 PM	SiCl4 pre valve closed
12/7/2011	12:52:36 PM	SiCl4 post valve closed
12/7/2011	12:52:36 PM	Main Vac valve closed
12/7/2011	12:52:36 PM	Bypass valve closed
12/7/2011	12:52:36 PM	H2 valve opened
12/7/2011	12:52:36 PM	Bubbler valve opened
12/7/2011	12:52:36 PM	Helium MFC set to  0.000000
12/7/2011	12:52:36 PM	H2 MFC set to  500.000000
12/7/2011	12:52:36 PM	BCl3 MFC set to  0.000000
12/7/2011	12:52:36 PM	PHl3 MFC set to  0.000000
12/7/2011	12:52:36 PM	SiCl4 MFC set to  0.000000
12/7/2011	12:52:36 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	12:52:36 PM	Tube furnace set to 1000
12/7/2011	1:15:36 PM	Helium valve closed
12/7/2011	1:15:36 PM	BCl3 valve closed
12/7/2011	1:15:36 PM	Main Vac valve closed
12/7/2011	1:15:36 PM	Bypass valve closed
12/7/2011	1:15:36 PM	H2 valve opened
12/7/2011	1:15:36 PM	PH3 valve opened
12/7/2011	1:15:36 PM	SiCl4 pre valve opened
12/7/2011	1:15:36 PM	SiCl4 post valve opened
12/7/2011	1:15:36 PM	Bubbler valve opened
12/7/2011	1:15:36 PM	Helium MFC set to  0.000000
12/7/2011	1:15:36 PM	H2 MFC set to  495.000000
12/7/2011	1:15:36 PM	BCl3 MFC set to  0.000000
12/7/2011	1:15:36 PM	PHl3 MFC set to  0.700000
12/7/2011	1:15:36 PM	SiCl4 MFC set to  25.000000
12/7/2011	1:15:36 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	1:15:36 PM	Tube furnace set to 1000
12/7/2011	1:35:36 PM	Helium valve closed
12/7/2011	1:35:36 PM	BCl3 valve closed
12/7/2011	1:35:36 PM	PH3 valve closed
12/7/2011	1:35:36 PM	SiCl4 pre valve closed
12/7/2011	1:35:36 PM	SiCl4 post valve closed
12/7/2011	1:35:36 PM	Main Vac valve closed
12/7/2011	1:35:36 PM	Bypass valve closed
12/7/2011	1:35:36 PM	H2 valve opened
12/7/2011	1:35:36 PM	Bubbler valve opened
12/7/2011	1:35:36 PM	Helium MFC set to  0.000000
12/7/2011	1:35:36 PM	H2 MFC set to  480.000000
12/7/2011	1:35:36 PM	BCl3 MFC set to  0.000000
12/7/2011	1:35:36 PM	PHl3 MFC set to  0.000000
12/7/2011	1:35:36 PM	SiCl4 MFC set to  0.000000
12/7/2011	1:35:36 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	1:35:36 PM	Tube furnace set to 750
12/7/2011	1:45:36 PM	H2 valve closed
12/7/2011	1:45:36 PM	BCl3 valve closed
12/7/2011	1:45:36 PM	PH3 valve closed
12/7/2011	1:45:36 PM	SiCl4 pre valve closed
12/7/2011	1:45:36 PM	SiCl4 post valve closed
12/7/2011	1:45:36 PM	Main Vac valve closed
12/7/2011	1:45:36 PM	Bypass valve closed
12/7/2011	1:45:36 PM	Helium valve opened
12/7/2011	1:45:36 PM	Bubbler valve opened
12/7/2011	1:45:36 PM	Helium MFC set to  400.000000
12/7/2011	1:45:36 PM	H2 MFC set to  0.000000
12/7/2011	1:45:36 PM	BCl3 MFC set to  0.000000
12/7/2011	1:45:36 PM	PHl3 MFC set to  0.000000
12/7/2011	1:45:36 PM	SiCl4 MFC set to  0.000000
12/7/2011	1:45:36 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	1:45:36 PM	Tube furnace set to 0
12/7/2011	2:10:36 PM	Helium valve closed
12/7/2011	2:10:36 PM	H2 valve closed
12/7/2011	2:10:36 PM	BCl3 valve closed
12/7/2011	2:10:36 PM	PH3 valve closed
12/7/2011	2:10:36 PM	SiCl4 pre valve closed
12/7/2011	2:10:36 PM	SiCl4 post valve closed
12/7/2011	2:10:36 PM	Main Vac valve closed
12/7/2011	2:10:36 PM	Bypass valve closed
12/7/2011	2:10:36 PM	Bubbler valve closed
12/7/2011	2:10:36 PM	Helium MFC set to  0.000000
12/7/2011	2:10:36 PM	H2 MFC set to  0.000000
12/7/2011	2:10:36 PM	BCl3 MFC set to  0.000000
12/7/2011	2:10:36 PM	PHl3 MFC set to  0.000000
12/7/2011	2:10:36 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:10:36 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:10:36 PM	Tube furnace set to 50
12/7/2011	2:15:36 PM	Helium valve closed
12/7/2011	2:15:36 PM	H2 valve closed
12/7/2011	2:15:36 PM	BCl3 valve closed
12/7/2011	2:15:36 PM	PH3 valve closed
12/7/2011	2:15:36 PM	SiCl4 pre valve closed
12/7/2011	2:15:36 PM	SiCl4 post valve closed
12/7/2011	2:15:36 PM	Main Vac valve closed
12/7/2011	2:15:36 PM	Bubbler valve closed
12/7/2011	2:15:36 PM	Bypass valve opened
12/7/2011	2:15:36 PM	Helium MFC set to  0.000000
12/7/2011	2:15:36 PM	H2 MFC set to  0.000000
12/7/2011	2:15:36 PM	BCl3 MFC set to  0.000000
12/7/2011	2:15:36 PM	PHl3 MFC set to  0.000000
12/7/2011	2:15:36 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:15:36 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:15:37 PM	Tube furnace set to 0
12/7/2011	2:20:37 PM	Helium valve closed
12/7/2011	2:20:37 PM	H2 valve closed
12/7/2011	2:20:37 PM	BCl3 valve closed
12/7/2011	2:20:37 PM	PH3 valve closed
12/7/2011	2:20:37 PM	SiCl4 pre valve closed
12/7/2011	2:20:37 PM	SiCl4 post valve closed
12/7/2011	2:20:37 PM	Bypass valve closed
12/7/2011	2:20:37 PM	Bubbler valve closed
12/7/2011	2:20:37 PM	Main Vac valve opened
12/7/2011	2:20:37 PM	Helium MFC set to  0.000000
12/7/2011	2:20:37 PM	H2 MFC set to  0.000000
12/7/2011	2:20:37 PM	BCl3 MFC set to  0.000000
12/7/2011	2:20:37 PM	PHl3 MFC set to  0.000000
12/7/2011	2:20:37 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:20:37 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:20:37 PM	Tube furnace set to 0
12/7/2011	2:20:38 PM	Run finished at 2:20 PM
12/7/2011	2:48:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2011	2:48:44 PM	Recipe started at 2:48 PM
12/7/2011	2:48:44 PM	Helium valve closed
12/7/2011	2:48:44 PM	H2 valve closed
12/7/2011	2:48:44 PM	BCl3 valve closed
12/7/2011	2:48:44 PM	PH3 valve closed
12/7/2011	2:48:44 PM	SiCl4 pre valve closed
12/7/2011	2:48:44 PM	SiCl4 post valve closed
12/7/2011	2:48:44 PM	Main Vac valve closed
12/7/2011	2:48:44 PM	Bypass valve closed
12/7/2011	2:48:44 PM	Bubbler valve closed
12/7/2011	2:48:44 PM	Helium MFC set to  0.000000
12/7/2011	2:48:44 PM	H2 MFC set to  0.000000
12/7/2011	2:48:44 PM	BCl3 MFC set to  0.000000
12/7/2011	2:48:44 PM	PHl3 MFC set to  0.000000
12/7/2011	2:48:44 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:48:44 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:48:44 PM	Tube furnace set to 0
12/7/2011	2:48:47 PM	H2 valve closed
12/7/2011	2:48:47 PM	BCl3 valve closed
12/7/2011	2:48:47 PM	PH3 valve closed
12/7/2011	2:48:47 PM	SiCl4 pre valve closed
12/7/2011	2:48:47 PM	SiCl4 post valve closed
12/7/2011	2:48:47 PM	Main Vac valve closed
12/7/2011	2:48:47 PM	Bypass valve closed
12/7/2011	2:48:47 PM	Bubbler valve closed
12/7/2011	2:48:47 PM	Helium valve opened
12/7/2011	2:48:47 PM	Helium MFC set to  500.000000
12/7/2011	2:48:47 PM	H2 MFC set to  0.000000
12/7/2011	2:48:47 PM	BCl3 MFC set to  0.000000
12/7/2011	2:48:47 PM	PHl3 MFC set to  0.000000
12/7/2011	2:48:47 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:48:47 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:48:47 PM	Tube furnace set to 0
12/7/2011	2:49:45 PM	Helium valve closed
12/7/2011	2:49:45 PM	H2 valve closed
12/7/2011	2:49:45 PM	BCl3 valve closed
12/7/2011	2:49:45 PM	PH3 valve closed
12/7/2011	2:49:45 PM	SiCl4 pre valve closed
12/7/2011	2:49:45 PM	SiCl4 post valve closed
12/7/2011	2:49:45 PM	Main Vac valve closed
12/7/2011	2:49:45 PM	Bypass valve closed
12/7/2011	2:49:45 PM	Bubbler valve closed
12/7/2011	2:49:45 PM	Helium MFC set to  0.000000
12/7/2011	2:49:45 PM	H2 MFC set to  0.000000
12/7/2011	2:49:45 PM	BCl3 MFC set to  0.000000
12/7/2011	2:49:45 PM	PHl3 MFC set to  0.000000
12/7/2011	2:49:45 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:49:45 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:49:45 PM	Tube furnace set to 0
12/7/2011	2:49:46 PM	Run finished at 2:49 PM
12/7/2011	2:49:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2011	2:52:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/7/2011	2:52:20 PM	Recipe started at 2:52 PM
12/7/2011	2:52:20 PM	Helium valve closed
12/7/2011	2:52:20 PM	H2 valve closed
12/7/2011	2:52:20 PM	BCl3 valve closed
12/7/2011	2:52:20 PM	PH3 valve closed
12/7/2011	2:52:20 PM	SiCl4 pre valve closed
12/7/2011	2:52:20 PM	SiCl4 post valve closed
12/7/2011	2:52:20 PM	Main Vac valve closed
12/7/2011	2:52:20 PM	Bubbler valve closed
12/7/2011	2:52:20 PM	Bypass valve opened
12/7/2011	2:52:20 PM	Helium MFC set to  0.000000
12/7/2011	2:52:20 PM	H2 MFC set to  0.000000
12/7/2011	2:52:20 PM	BCl3 MFC set to  0.000000
12/7/2011	2:52:20 PM	PHl3 MFC set to  0.000000
12/7/2011	2:52:20 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:52:20 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:52:20 PM	Tube furnace set to 0
12/7/2011	2:53:18 PM	Helium valve closed
12/7/2011	2:53:18 PM	H2 valve closed
12/7/2011	2:53:18 PM	BCl3 valve closed
12/7/2011	2:53:18 PM	PH3 valve closed
12/7/2011	2:53:18 PM	SiCl4 pre valve closed
12/7/2011	2:53:18 PM	SiCl4 post valve closed
12/7/2011	2:53:18 PM	Main Vac valve closed
12/7/2011	2:53:18 PM	Bubbler valve closed
12/7/2011	2:53:18 PM	Bypass valve opened
12/7/2011	2:53:18 PM	Helium MFC set to  0.000000
12/7/2011	2:53:18 PM	H2 MFC set to  0.000000
12/7/2011	2:53:18 PM	BCl3 MFC set to  0.000000
12/7/2011	2:53:18 PM	PHl3 MFC set to  0.000000
12/7/2011	2:53:18 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:53:18 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:53:18 PM	Tube furnace set to 0
12/7/2011	2:53:25 PM	Helium valve closed
12/7/2011	2:53:25 PM	H2 valve closed
12/7/2011	2:53:25 PM	BCl3 valve closed
12/7/2011	2:53:25 PM	PH3 valve closed
12/7/2011	2:53:25 PM	SiCl4 pre valve closed
12/7/2011	2:53:25 PM	SiCl4 post valve closed
12/7/2011	2:53:25 PM	Bypass valve closed
12/7/2011	2:53:25 PM	Bubbler valve closed
12/7/2011	2:53:25 PM	Main Vac valve opened
12/7/2011	2:53:25 PM	Helium MFC set to  0.000000
12/7/2011	2:53:25 PM	H2 MFC set to  0.000000
12/7/2011	2:53:25 PM	BCl3 MFC set to  0.000000
12/7/2011	2:53:25 PM	PHl3 MFC set to  0.000000
12/7/2011	2:53:25 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:53:25 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:53:25 PM	Tube furnace set to 0
12/7/2011	2:53:26 PM	Run finished at 2:53 PM
12/7/2011	2:53:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/7/2011	2:54:01 PM	Recipe started at 2:53 PM
12/7/2011	2:54:01 PM	Helium valve closed
12/7/2011	2:54:01 PM	H2 valve closed
12/7/2011	2:54:01 PM	BCl3 valve closed
12/7/2011	2:54:01 PM	PH3 valve closed
12/7/2011	2:54:01 PM	SiCl4 pre valve closed
12/7/2011	2:54:01 PM	SiCl4 post valve closed
12/7/2011	2:54:01 PM	Bypass valve closed
12/7/2011	2:54:01 PM	Bubbler valve closed
12/7/2011	2:54:01 PM	Main Vac valve opened
12/7/2011	2:54:01 PM	Helium MFC set to  0.000000
12/7/2011	2:54:01 PM	H2 MFC set to  0.000000
12/7/2011	2:54:01 PM	BCl3 MFC set to  0.000000
12/7/2011	2:54:01 PM	PHl3 MFC set to  0.000000
12/7/2011	2:54:01 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:54:01 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:54:02 PM	Tube furnace set to 150
12/7/2011	2:54:32 PM	H2 valve closed
12/7/2011	2:54:32 PM	BCl3 valve closed
12/7/2011	2:54:32 PM	PH3 valve closed
12/7/2011	2:54:32 PM	SiCl4 pre valve closed
12/7/2011	2:54:32 PM	SiCl4 post valve closed
12/7/2011	2:54:32 PM	Bypass valve closed
12/7/2011	2:54:32 PM	Bubbler valve closed
12/7/2011	2:54:32 PM	Helium valve opened
12/7/2011	2:54:32 PM	Main Vac valve opened
12/7/2011	2:54:32 PM	Helium MFC set to  20.000000
12/7/2011	2:54:32 PM	H2 MFC set to  0.000000
12/7/2011	2:54:32 PM	BCl3 MFC set to  0.000000
12/7/2011	2:54:32 PM	PHl3 MFC set to  0.000000
12/7/2011	2:54:32 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:54:32 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:54:32 PM	Tube furnace set to 150
12/7/2011	2:55:02 PM	Helium valve closed
12/7/2011	2:55:02 PM	H2 valve closed
12/7/2011	2:55:02 PM	BCl3 valve closed
12/7/2011	2:55:02 PM	PH3 valve closed
12/7/2011	2:55:02 PM	SiCl4 pre valve closed
12/7/2011	2:55:02 PM	SiCl4 post valve closed
12/7/2011	2:55:02 PM	Bypass valve closed
12/7/2011	2:55:02 PM	Bubbler valve closed
12/7/2011	2:55:02 PM	Main Vac valve opened
12/7/2011	2:55:02 PM	Helium MFC set to  0.000000
12/7/2011	2:55:02 PM	H2 MFC set to  0.000000
12/7/2011	2:55:02 PM	BCl3 MFC set to  0.000000
12/7/2011	2:55:02 PM	PHl3 MFC set to  0.000000
12/7/2011	2:55:02 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:55:02 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:55:02 PM	Tube furnace set to 150
12/7/2011	2:55:32 PM	H2 valve closed
12/7/2011	2:55:32 PM	BCl3 valve closed
12/7/2011	2:55:32 PM	PH3 valve closed
12/7/2011	2:55:32 PM	SiCl4 pre valve closed
12/7/2011	2:55:32 PM	SiCl4 post valve closed
12/7/2011	2:55:32 PM	Bypass valve closed
12/7/2011	2:55:32 PM	Bubbler valve closed
12/7/2011	2:55:32 PM	Helium valve opened
12/7/2011	2:55:32 PM	Main Vac valve opened
12/7/2011	2:55:32 PM	Helium MFC set to  20.000000
12/7/2011	2:55:32 PM	H2 MFC set to  0.000000
12/7/2011	2:55:32 PM	BCl3 MFC set to  0.000000
12/7/2011	2:55:32 PM	PHl3 MFC set to  0.000000
12/7/2011	2:55:32 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:55:32 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:55:32 PM	Tube furnace set to 150
12/7/2011	2:56:02 PM	Helium valve closed
12/7/2011	2:56:02 PM	H2 valve closed
12/7/2011	2:56:02 PM	BCl3 valve closed
12/7/2011	2:56:02 PM	PH3 valve closed
12/7/2011	2:56:02 PM	SiCl4 pre valve closed
12/7/2011	2:56:02 PM	SiCl4 post valve closed
12/7/2011	2:56:02 PM	Bypass valve closed
12/7/2011	2:56:02 PM	Bubbler valve closed
12/7/2011	2:56:02 PM	Main Vac valve opened
12/7/2011	2:56:02 PM	Helium MFC set to  0.000000
12/7/2011	2:56:02 PM	H2 MFC set to  0.000000
12/7/2011	2:56:02 PM	BCl3 MFC set to  0.000000
12/7/2011	2:56:02 PM	PHl3 MFC set to  0.000000
12/7/2011	2:56:02 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:56:02 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:56:02 PM	Tube furnace set to 150
12/7/2011	2:56:32 PM	H2 valve closed
12/7/2011	2:56:32 PM	BCl3 valve closed
12/7/2011	2:56:32 PM	PH3 valve closed
12/7/2011	2:56:32 PM	SiCl4 pre valve closed
12/7/2011	2:56:32 PM	SiCl4 post valve closed
12/7/2011	2:56:32 PM	Bypass valve closed
12/7/2011	2:56:32 PM	Bubbler valve closed
12/7/2011	2:56:32 PM	Helium valve opened
12/7/2011	2:56:32 PM	Main Vac valve opened
12/7/2011	2:56:32 PM	Helium MFC set to  20.000000
12/7/2011	2:56:32 PM	H2 MFC set to  0.000000
12/7/2011	2:56:32 PM	BCl3 MFC set to  0.000000
12/7/2011	2:56:32 PM	PHl3 MFC set to  0.000000
12/7/2011	2:56:32 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:56:32 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:56:33 PM	Tube furnace set to 150
12/7/2011	2:57:03 PM	Helium valve closed
12/7/2011	2:57:03 PM	H2 valve closed
12/7/2011	2:57:03 PM	BCl3 valve closed
12/7/2011	2:57:03 PM	PH3 valve closed
12/7/2011	2:57:03 PM	SiCl4 pre valve closed
12/7/2011	2:57:03 PM	SiCl4 post valve closed
12/7/2011	2:57:03 PM	Bypass valve closed
12/7/2011	2:57:03 PM	Bubbler valve closed
12/7/2011	2:57:03 PM	Main Vac valve opened
12/7/2011	2:57:03 PM	Helium MFC set to  0.000000
12/7/2011	2:57:03 PM	H2 MFC set to  0.000000
12/7/2011	2:57:03 PM	BCl3 MFC set to  0.000000
12/7/2011	2:57:03 PM	PHl3 MFC set to  0.000000
12/7/2011	2:57:03 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:57:03 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:57:03 PM	Tube furnace set to 150
12/7/2011	2:57:33 PM	H2 valve closed
12/7/2011	2:57:33 PM	BCl3 valve closed
12/7/2011	2:57:33 PM	PH3 valve closed
12/7/2011	2:57:33 PM	SiCl4 pre valve closed
12/7/2011	2:57:33 PM	SiCl4 post valve closed
12/7/2011	2:57:33 PM	Bypass valve closed
12/7/2011	2:57:33 PM	Bubbler valve closed
12/7/2011	2:57:33 PM	Helium valve opened
12/7/2011	2:57:33 PM	Main Vac valve opened
12/7/2011	2:57:33 PM	Helium MFC set to  20.000000
12/7/2011	2:57:33 PM	H2 MFC set to  0.000000
12/7/2011	2:57:33 PM	BCl3 MFC set to  0.000000
12/7/2011	2:57:33 PM	PHl3 MFC set to  0.000000
12/7/2011	2:57:33 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:57:33 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:57:33 PM	Tube furnace set to 150
12/7/2011	2:58:03 PM	Helium valve closed
12/7/2011	2:58:03 PM	H2 valve closed
12/7/2011	2:58:03 PM	BCl3 valve closed
12/7/2011	2:58:03 PM	PH3 valve closed
12/7/2011	2:58:03 PM	SiCl4 pre valve closed
12/7/2011	2:58:03 PM	SiCl4 post valve closed
12/7/2011	2:58:03 PM	Bypass valve closed
12/7/2011	2:58:03 PM	Bubbler valve closed
12/7/2011	2:58:03 PM	Main Vac valve opened
12/7/2011	2:58:03 PM	Helium MFC set to  0.000000
12/7/2011	2:58:03 PM	H2 MFC set to  0.000000
12/7/2011	2:58:03 PM	BCl3 MFC set to  0.000000
12/7/2011	2:58:03 PM	PHl3 MFC set to  0.000000
12/7/2011	2:58:03 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:58:03 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:58:03 PM	Tube furnace set to 150
12/7/2011	2:58:33 PM	H2 valve closed
12/7/2011	2:58:33 PM	BCl3 valve closed
12/7/2011	2:58:33 PM	PH3 valve closed
12/7/2011	2:58:33 PM	SiCl4 pre valve closed
12/7/2011	2:58:33 PM	SiCl4 post valve closed
12/7/2011	2:58:33 PM	Bypass valve closed
12/7/2011	2:58:33 PM	Bubbler valve closed
12/7/2011	2:58:33 PM	Helium valve opened
12/7/2011	2:58:33 PM	Main Vac valve opened
12/7/2011	2:58:33 PM	Helium MFC set to  20.000000
12/7/2011	2:58:33 PM	H2 MFC set to  0.000000
12/7/2011	2:58:33 PM	BCl3 MFC set to  0.000000
12/7/2011	2:58:33 PM	PHl3 MFC set to  0.000000
12/7/2011	2:58:33 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:58:33 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:58:33 PM	Tube furnace set to 150
12/7/2011	2:59:03 PM	Helium valve closed
12/7/2011	2:59:03 PM	H2 valve closed
12/7/2011	2:59:03 PM	BCl3 valve closed
12/7/2011	2:59:03 PM	PH3 valve closed
12/7/2011	2:59:03 PM	SiCl4 pre valve closed
12/7/2011	2:59:03 PM	SiCl4 post valve closed
12/7/2011	2:59:03 PM	Bypass valve closed
12/7/2011	2:59:03 PM	Bubbler valve closed
12/7/2011	2:59:03 PM	Main Vac valve opened
12/7/2011	2:59:03 PM	Helium MFC set to  0.000000
12/7/2011	2:59:03 PM	H2 MFC set to  0.000000
12/7/2011	2:59:03 PM	BCl3 MFC set to  0.000000
12/7/2011	2:59:03 PM	PHl3 MFC set to  0.000000
12/7/2011	2:59:03 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:59:03 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:59:04 PM	Tube furnace set to 150
12/7/2011	2:59:34 PM	H2 valve closed
12/7/2011	2:59:34 PM	BCl3 valve closed
12/7/2011	2:59:34 PM	PH3 valve closed
12/7/2011	2:59:34 PM	SiCl4 pre valve closed
12/7/2011	2:59:34 PM	SiCl4 post valve closed
12/7/2011	2:59:34 PM	Bypass valve closed
12/7/2011	2:59:34 PM	Bubbler valve closed
12/7/2011	2:59:34 PM	Helium valve opened
12/7/2011	2:59:34 PM	Main Vac valve opened
12/7/2011	2:59:34 PM	Helium MFC set to  20.000000
12/7/2011	2:59:34 PM	H2 MFC set to  0.000000
12/7/2011	2:59:34 PM	BCl3 MFC set to  0.000000
12/7/2011	2:59:34 PM	PHl3 MFC set to  0.000000
12/7/2011	2:59:34 PM	SiCl4 MFC set to  0.000000
12/7/2011	2:59:34 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	2:59:34 PM	Tube furnace set to 150
12/7/2011	3:00:04 PM	Helium valve closed
12/7/2011	3:00:04 PM	H2 valve closed
12/7/2011	3:00:04 PM	BCl3 valve closed
12/7/2011	3:00:04 PM	PH3 valve closed
12/7/2011	3:00:04 PM	SiCl4 pre valve closed
12/7/2011	3:00:04 PM	SiCl4 post valve closed
12/7/2011	3:00:04 PM	Bypass valve closed
12/7/2011	3:00:04 PM	Bubbler valve closed
12/7/2011	3:00:04 PM	Main Vac valve opened
12/7/2011	3:00:04 PM	Helium MFC set to  0.000000
12/7/2011	3:00:04 PM	H2 MFC set to  0.000000
12/7/2011	3:00:04 PM	BCl3 MFC set to  0.000000
12/7/2011	3:00:04 PM	PHl3 MFC set to  0.000000
12/7/2011	3:00:04 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:00:04 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:00:04 PM	Tube furnace set to 150
12/7/2011	3:00:34 PM	H2 valve closed
12/7/2011	3:00:34 PM	BCl3 valve closed
12/7/2011	3:00:34 PM	PH3 valve closed
12/7/2011	3:00:34 PM	SiCl4 pre valve closed
12/7/2011	3:00:34 PM	SiCl4 post valve closed
12/7/2011	3:00:34 PM	Bypass valve closed
12/7/2011	3:00:34 PM	Bubbler valve closed
12/7/2011	3:00:34 PM	Helium valve opened
12/7/2011	3:00:34 PM	Main Vac valve opened
12/7/2011	3:00:34 PM	Helium MFC set to  20.000000
12/7/2011	3:00:34 PM	H2 MFC set to  0.000000
12/7/2011	3:00:34 PM	BCl3 MFC set to  0.000000
12/7/2011	3:00:34 PM	PHl3 MFC set to  0.000000
12/7/2011	3:00:34 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:00:34 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:00:34 PM	Tube furnace set to 150
12/7/2011	3:01:04 PM	Helium valve closed
12/7/2011	3:01:04 PM	H2 valve closed
12/7/2011	3:01:04 PM	BCl3 valve closed
12/7/2011	3:01:04 PM	PH3 valve closed
12/7/2011	3:01:04 PM	SiCl4 pre valve closed
12/7/2011	3:01:04 PM	SiCl4 post valve closed
12/7/2011	3:01:04 PM	Bypass valve closed
12/7/2011	3:01:04 PM	Bubbler valve closed
12/7/2011	3:01:04 PM	Main Vac valve opened
12/7/2011	3:01:04 PM	Helium MFC set to  0.000000
12/7/2011	3:01:04 PM	H2 MFC set to  0.000000
12/7/2011	3:01:04 PM	BCl3 MFC set to  0.000000
12/7/2011	3:01:04 PM	PHl3 MFC set to  0.000000
12/7/2011	3:01:04 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:01:04 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:01:04 PM	Tube furnace set to 150
12/7/2011	3:01:34 PM	H2 valve closed
12/7/2011	3:01:34 PM	BCl3 valve closed
12/7/2011	3:01:34 PM	PH3 valve closed
12/7/2011	3:01:34 PM	SiCl4 pre valve closed
12/7/2011	3:01:34 PM	SiCl4 post valve closed
12/7/2011	3:01:34 PM	Bypass valve closed
12/7/2011	3:01:34 PM	Bubbler valve closed
12/7/2011	3:01:34 PM	Helium valve opened
12/7/2011	3:01:34 PM	Main Vac valve opened
12/7/2011	3:01:34 PM	Helium MFC set to  20.000000
12/7/2011	3:01:34 PM	H2 MFC set to  0.000000
12/7/2011	3:01:34 PM	BCl3 MFC set to  0.000000
12/7/2011	3:01:34 PM	PHl3 MFC set to  0.000000
12/7/2011	3:01:34 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:01:34 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:01:35 PM	Tube furnace set to 150
12/7/2011	3:02:05 PM	Helium valve closed
12/7/2011	3:02:05 PM	H2 valve closed
12/7/2011	3:02:05 PM	BCl3 valve closed
12/7/2011	3:02:05 PM	PH3 valve closed
12/7/2011	3:02:05 PM	SiCl4 pre valve closed
12/7/2011	3:02:05 PM	SiCl4 post valve closed
12/7/2011	3:02:05 PM	Bypass valve closed
12/7/2011	3:02:05 PM	Bubbler valve closed
12/7/2011	3:02:05 PM	Main Vac valve opened
12/7/2011	3:02:05 PM	Helium MFC set to  0.000000
12/7/2011	3:02:05 PM	H2 MFC set to  0.000000
12/7/2011	3:02:05 PM	BCl3 MFC set to  0.000000
12/7/2011	3:02:05 PM	PHl3 MFC set to  0.000000
12/7/2011	3:02:05 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:02:05 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:02:05 PM	Tube furnace set to 150
12/7/2011	3:02:35 PM	H2 valve closed
12/7/2011	3:02:35 PM	BCl3 valve closed
12/7/2011	3:02:35 PM	PH3 valve closed
12/7/2011	3:02:35 PM	SiCl4 pre valve closed
12/7/2011	3:02:35 PM	SiCl4 post valve closed
12/7/2011	3:02:35 PM	Bypass valve closed
12/7/2011	3:02:35 PM	Bubbler valve closed
12/7/2011	3:02:35 PM	Helium valve opened
12/7/2011	3:02:35 PM	Main Vac valve opened
12/7/2011	3:02:35 PM	Helium MFC set to  20.000000
12/7/2011	3:02:35 PM	H2 MFC set to  0.000000
12/7/2011	3:02:35 PM	BCl3 MFC set to  0.000000
12/7/2011	3:02:35 PM	PHl3 MFC set to  0.000000
12/7/2011	3:02:35 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:02:35 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:02:35 PM	Tube furnace set to 150
12/7/2011	3:03:05 PM	Helium valve closed
12/7/2011	3:03:05 PM	H2 valve closed
12/7/2011	3:03:05 PM	BCl3 valve closed
12/7/2011	3:03:05 PM	PH3 valve closed
12/7/2011	3:03:05 PM	SiCl4 pre valve closed
12/7/2011	3:03:05 PM	SiCl4 post valve closed
12/7/2011	3:03:05 PM	Bypass valve closed
12/7/2011	3:03:05 PM	Bubbler valve closed
12/7/2011	3:03:05 PM	Main Vac valve opened
12/7/2011	3:03:05 PM	Helium MFC set to  0.000000
12/7/2011	3:03:05 PM	H2 MFC set to  0.000000
12/7/2011	3:03:05 PM	BCl3 MFC set to  0.000000
12/7/2011	3:03:05 PM	PHl3 MFC set to  0.000000
12/7/2011	3:03:05 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:03:05 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:03:05 PM	Tube furnace set to 150
12/7/2011	3:03:35 PM	H2 valve closed
12/7/2011	3:03:35 PM	BCl3 valve closed
12/7/2011	3:03:35 PM	PH3 valve closed
12/7/2011	3:03:35 PM	SiCl4 pre valve closed
12/7/2011	3:03:35 PM	SiCl4 post valve closed
12/7/2011	3:03:35 PM	Bypass valve closed
12/7/2011	3:03:35 PM	Bubbler valve closed
12/7/2011	3:03:35 PM	Helium valve opened
12/7/2011	3:03:35 PM	Main Vac valve opened
12/7/2011	3:03:35 PM	Helium MFC set to  20.000000
12/7/2011	3:03:35 PM	H2 MFC set to  0.000000
12/7/2011	3:03:35 PM	BCl3 MFC set to  0.000000
12/7/2011	3:03:35 PM	PHl3 MFC set to  0.000000
12/7/2011	3:03:35 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:03:35 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:03:35 PM	Tube furnace set to 150
12/7/2011	3:04:05 PM	Helium valve closed
12/7/2011	3:04:05 PM	H2 valve closed
12/7/2011	3:04:05 PM	BCl3 valve closed
12/7/2011	3:04:05 PM	PH3 valve closed
12/7/2011	3:04:05 PM	SiCl4 pre valve closed
12/7/2011	3:04:05 PM	SiCl4 post valve closed
12/7/2011	3:04:05 PM	Bypass valve closed
12/7/2011	3:04:05 PM	Bubbler valve closed
12/7/2011	3:04:05 PM	Main Vac valve opened
12/7/2011	3:04:05 PM	Helium MFC set to  0.000000
12/7/2011	3:04:05 PM	H2 MFC set to  0.000000
12/7/2011	3:04:05 PM	BCl3 MFC set to  0.000000
12/7/2011	3:04:05 PM	PHl3 MFC set to  0.000000
12/7/2011	3:04:05 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:04:05 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:04:06 PM	Tube furnace set to 150
12/7/2011	3:04:07 PM	Run finished at 3:04 PM
12/7/2011	3:19:20 PM	Main Vac valve closed
12/7/2011	3:19:28 PM	Main Vac valve opened
12/7/2011	3:19:39 PM	Recipe started at 3:19 PM
12/7/2011	3:19:39 PM	Helium valve closed
12/7/2011	3:19:39 PM	H2 valve closed
12/7/2011	3:19:39 PM	BCl3 valve closed
12/7/2011	3:19:39 PM	PH3 valve closed
12/7/2011	3:19:40 PM	SiCl4 pre valve closed
12/7/2011	3:19:40 PM	SiCl4 post valve closed
12/7/2011	3:19:40 PM	Main Vac valve closed
12/7/2011	3:19:40 PM	Bypass valve closed
12/7/2011	3:19:40 PM	Bubbler valve closed
12/7/2011	3:19:40 PM	Helium MFC set to  0.000000
12/7/2011	3:19:40 PM	H2 MFC set to  0.000000
12/7/2011	3:19:40 PM	BCl3 MFC set to  0.000000
12/7/2011	3:19:40 PM	PHl3 MFC set to  0.000000
12/7/2011	3:19:40 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:19:40 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:19:40 PM	Tube furnace set to 0
12/7/2011	3:19:43 PM	Helium valve closed
12/7/2011	3:19:43 PM	BCl3 valve closed
12/7/2011	3:19:43 PM	PH3 valve closed
12/7/2011	3:19:43 PM	SiCl4 pre valve closed
12/7/2011	3:19:43 PM	SiCl4 post valve closed
12/7/2011	3:19:43 PM	Main Vac valve closed
12/7/2011	3:19:43 PM	Bypass valve closed
12/7/2011	3:19:43 PM	Bubbler valve closed
12/7/2011	3:19:43 PM	H2 valve opened
12/7/2011	3:19:43 PM	Helium MFC set to  0.000000
12/7/2011	3:19:43 PM	H2 MFC set to  500.000000
12/7/2011	3:19:43 PM	BCl3 MFC set to  0.000000
12/7/2011	3:19:43 PM	PHl3 MFC set to  0.000000
12/7/2011	3:19:43 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:19:43 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:19:43 PM	Tube furnace set to 50
12/7/2011	3:20:46 PM	Helium valve closed
12/7/2011	3:20:46 PM	BCl3 valve closed
12/7/2011	3:20:46 PM	PH3 valve closed
12/7/2011	3:20:46 PM	SiCl4 pre valve closed
12/7/2011	3:20:46 PM	SiCl4 post valve closed
12/7/2011	3:20:46 PM	Main Vac valve closed
12/7/2011	3:20:46 PM	Bypass valve closed
12/7/2011	3:20:46 PM	H2 valve opened
12/7/2011	3:20:46 PM	Bubbler valve opened
12/7/2011	3:20:46 PM	Helium MFC set to  0.000000
12/7/2011	3:20:46 PM	H2 MFC set to  500.000000
12/7/2011	3:20:46 PM	BCl3 MFC set to  0.000000
12/7/2011	3:20:46 PM	PHl3 MFC set to  0.000000
12/7/2011	3:20:46 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:20:46 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:20:46 PM	Tube furnace set to 50
12/7/2011	3:20:47 PM	Helium valve closed
12/7/2011	3:20:47 PM	BCl3 valve closed
12/7/2011	3:20:47 PM	PH3 valve closed
12/7/2011	3:20:47 PM	SiCl4 pre valve closed
12/7/2011	3:20:47 PM	SiCl4 post valve closed
12/7/2011	3:20:47 PM	Main Vac valve closed
12/7/2011	3:20:47 PM	Bypass valve closed
12/7/2011	3:20:47 PM	H2 valve opened
12/7/2011	3:20:47 PM	Bubbler valve opened
12/7/2011	3:20:47 PM	Helium MFC set to  0.000000
12/7/2011	3:20:47 PM	H2 MFC set to  500.000000
12/7/2011	3:20:47 PM	BCl3 MFC set to  0.000000
12/7/2011	3:20:47 PM	PHl3 MFC set to  0.000000
12/7/2011	3:20:47 PM	SiCl4 MFC set to  0.000000
12/7/2011	3:20:47 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:20:47 PM	Tube furnace set to 1000
12/7/2011	3:43:47 PM	Helium valve closed
12/7/2011	3:43:47 PM	BCl3 valve closed
12/7/2011	3:43:47 PM	Main Vac valve closed
12/7/2011	3:43:47 PM	Bypass valve closed
12/7/2011	3:43:47 PM	H2 valve opened
12/7/2011	3:43:47 PM	PH3 valve opened
12/7/2011	3:43:47 PM	SiCl4 pre valve opened
12/7/2011	3:43:47 PM	SiCl4 post valve opened
12/7/2011	3:43:47 PM	Bubbler valve opened
12/7/2011	3:43:47 PM	Helium MFC set to  0.000000
12/7/2011	3:43:47 PM	H2 MFC set to  495.000000
12/7/2011	3:43:47 PM	BCl3 MFC set to  0.000000
12/7/2011	3:43:47 PM	PHl3 MFC set to  0.700000
12/7/2011	3:43:47 PM	SiCl4 MFC set to  25.000000
12/7/2011	3:43:47 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	3:43:47 PM	Tube furnace set to 1000
12/7/2011	4:03:47 PM	Helium valve closed
12/7/2011	4:03:47 PM	BCl3 valve closed
12/7/2011	4:03:47 PM	PH3 valve closed
12/7/2011	4:03:47 PM	SiCl4 pre valve closed
12/7/2011	4:03:47 PM	SiCl4 post valve closed
12/7/2011	4:03:47 PM	Main Vac valve closed
12/7/2011	4:03:47 PM	Bypass valve closed
12/7/2011	4:03:47 PM	H2 valve opened
12/7/2011	4:03:47 PM	Bubbler valve opened
12/7/2011	4:03:47 PM	Helium MFC set to  0.000000
12/7/2011	4:03:47 PM	H2 MFC set to  480.000000
12/7/2011	4:03:47 PM	BCl3 MFC set to  0.000000
12/7/2011	4:03:47 PM	PHl3 MFC set to  0.000000
12/7/2011	4:03:47 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:03:47 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:03:47 PM	Tube furnace set to 750
12/7/2011	4:13:47 PM	H2 valve closed
12/7/2011	4:13:47 PM	BCl3 valve closed
12/7/2011	4:13:47 PM	PH3 valve closed
12/7/2011	4:13:47 PM	SiCl4 pre valve closed
12/7/2011	4:13:47 PM	SiCl4 post valve closed
12/7/2011	4:13:47 PM	Main Vac valve closed
12/7/2011	4:13:47 PM	Bypass valve closed
12/7/2011	4:13:47 PM	Helium valve opened
12/7/2011	4:13:47 PM	Bubbler valve opened
12/7/2011	4:13:47 PM	Helium MFC set to  400.000000
12/7/2011	4:13:47 PM	H2 MFC set to  0.000000
12/7/2011	4:13:47 PM	BCl3 MFC set to  0.000000
12/7/2011	4:13:47 PM	PHl3 MFC set to  0.000000
12/7/2011	4:13:47 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:13:47 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:13:47 PM	Tube furnace set to 0
12/7/2011	4:38:48 PM	Helium valve closed
12/7/2011	4:38:48 PM	H2 valve closed
12/7/2011	4:38:48 PM	BCl3 valve closed
12/7/2011	4:38:48 PM	PH3 valve closed
12/7/2011	4:38:48 PM	SiCl4 pre valve closed
12/7/2011	4:38:48 PM	SiCl4 post valve closed
12/7/2011	4:38:48 PM	Main Vac valve closed
12/7/2011	4:38:48 PM	Bypass valve closed
12/7/2011	4:38:48 PM	Bubbler valve closed
12/7/2011	4:38:48 PM	Helium MFC set to  0.000000
12/7/2011	4:38:48 PM	H2 MFC set to  0.000000
12/7/2011	4:38:48 PM	BCl3 MFC set to  0.000000
12/7/2011	4:38:48 PM	PHl3 MFC set to  0.000000
12/7/2011	4:38:48 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:38:48 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:38:48 PM	Tube furnace set to 50
12/7/2011	4:43:48 PM	Helium valve closed
12/7/2011	4:43:48 PM	H2 valve closed
12/7/2011	4:43:48 PM	BCl3 valve closed
12/7/2011	4:43:48 PM	PH3 valve closed
12/7/2011	4:43:48 PM	SiCl4 pre valve closed
12/7/2011	4:43:48 PM	SiCl4 post valve closed
12/7/2011	4:43:48 PM	Main Vac valve closed
12/7/2011	4:43:48 PM	Bubbler valve closed
12/7/2011	4:43:48 PM	Bypass valve opened
12/7/2011	4:43:48 PM	Helium MFC set to  0.000000
12/7/2011	4:43:48 PM	H2 MFC set to  0.000000
12/7/2011	4:43:48 PM	BCl3 MFC set to  0.000000
12/7/2011	4:43:48 PM	PHl3 MFC set to  0.000000
12/7/2011	4:43:48 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:43:48 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:43:48 PM	Tube furnace set to 0
12/7/2011	4:46:07 PM	Run aborted at 4:46 PM
12/7/2011	4:46:07 PM	Helium valve closed
12/7/2011	4:46:07 PM	H2 valve closed
12/7/2011	4:46:07 PM	BCl3 valve closed
12/7/2011	4:46:07 PM	PH3 valve closed
12/7/2011	4:46:07 PM	SiCl4 pre valve closed
12/7/2011	4:46:07 PM	SiCl4 post valve closed
12/7/2011	4:46:07 PM	Bypass valve closed
12/7/2011	4:46:07 PM	Main Vac valve closed
12/7/2011	4:46:07 PM	Bubbler valve closed
12/7/2011	4:46:07 PM	Helium MFC set to  0.000000
12/7/2011	4:46:07 PM	H2 MFC set to  0.000000
12/7/2011	4:46:07 PM	BCl3 MFC set to  0.000000
12/7/2011	4:46:07 PM	PHl3 MFC set to  0.000000
12/7/2011	4:46:07 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:46:07 PM	Tube furnace set to 0
12/7/2011	4:46:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2011	4:46:10 PM	Recipe started at 4:46 PM
12/7/2011	4:46:10 PM	Helium valve closed
12/7/2011	4:46:10 PM	H2 valve closed
12/7/2011	4:46:10 PM	BCl3 valve closed
12/7/2011	4:46:10 PM	PH3 valve closed
12/7/2011	4:46:10 PM	SiCl4 pre valve closed
12/7/2011	4:46:10 PM	SiCl4 post valve closed
12/7/2011	4:46:10 PM	Main Vac valve closed
12/7/2011	4:46:10 PM	Bypass valve closed
12/7/2011	4:46:10 PM	Bubbler valve closed
12/7/2011	4:46:10 PM	Helium MFC set to  0.000000
12/7/2011	4:46:10 PM	H2 MFC set to  0.000000
12/7/2011	4:46:10 PM	BCl3 MFC set to  0.000000
12/7/2011	4:46:10 PM	PHl3 MFC set to  0.000000
12/7/2011	4:46:10 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:46:10 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:46:10 PM	Tube furnace set to 0
12/7/2011	4:46:13 PM	H2 valve closed
12/7/2011	4:46:13 PM	BCl3 valve closed
12/7/2011	4:46:13 PM	PH3 valve closed
12/7/2011	4:46:13 PM	SiCl4 pre valve closed
12/7/2011	4:46:13 PM	SiCl4 post valve closed
12/7/2011	4:46:13 PM	Main Vac valve closed
12/7/2011	4:46:13 PM	Bypass valve closed
12/7/2011	4:46:13 PM	Bubbler valve closed
12/7/2011	4:46:13 PM	Helium valve opened
12/7/2011	4:46:13 PM	Helium MFC set to  500.000000
12/7/2011	4:46:13 PM	H2 MFC set to  0.000000
12/7/2011	4:46:13 PM	BCl3 MFC set to  0.000000
12/7/2011	4:46:13 PM	PHl3 MFC set to  0.000000
12/7/2011	4:46:13 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:46:13 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:46:13 PM	Tube furnace set to 0
12/7/2011	4:47:12 PM	Helium valve closed
12/7/2011	4:47:12 PM	H2 valve closed
12/7/2011	4:47:12 PM	BCl3 valve closed
12/7/2011	4:47:12 PM	PH3 valve closed
12/7/2011	4:47:12 PM	SiCl4 pre valve closed
12/7/2011	4:47:12 PM	SiCl4 post valve closed
12/7/2011	4:47:12 PM	Main Vac valve closed
12/7/2011	4:47:12 PM	Bypass valve closed
12/7/2011	4:47:12 PM	Bubbler valve closed
12/7/2011	4:47:12 PM	Helium MFC set to  0.000000
12/7/2011	4:47:12 PM	H2 MFC set to  0.000000
12/7/2011	4:47:12 PM	BCl3 MFC set to  0.000000
12/7/2011	4:47:12 PM	PHl3 MFC set to  0.000000
12/7/2011	4:47:12 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:47:12 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:47:12 PM	Tube furnace set to 0
12/7/2011	4:47:13 PM	Run finished at 4:47 PM
12/7/2011	4:47:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2011	4:49:20 PM	Bypass valve opened
12/7/2011	4:50:28 PM	Bypass valve closed
12/7/2011	4:50:28 PM	Main Vac valve opened
12/7/2011	4:51:26 PM	Recipe started at 4:51 PM
12/7/2011	4:51:26 PM	Helium valve closed
12/7/2011	4:51:26 PM	H2 valve closed
12/7/2011	4:51:26 PM	BCl3 valve closed
12/7/2011	4:51:26 PM	PH3 valve closed
12/7/2011	4:51:26 PM	SiCl4 pre valve closed
12/7/2011	4:51:26 PM	SiCl4 post valve closed
12/7/2011	4:51:26 PM	Bypass valve closed
12/7/2011	4:51:26 PM	Bubbler valve closed
12/7/2011	4:51:26 PM	Main Vac valve opened
12/7/2011	4:51:26 PM	Helium MFC set to  0.000000
12/7/2011	4:51:26 PM	H2 MFC set to  0.000000
12/7/2011	4:51:26 PM	BCl3 MFC set to  0.000000
12/7/2011	4:51:26 PM	PHl3 MFC set to  0.000000
12/7/2011	4:51:26 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:51:26 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:51:26 PM	Tube furnace set to 150
12/7/2011	4:51:56 PM	H2 valve closed
12/7/2011	4:51:56 PM	BCl3 valve closed
12/7/2011	4:51:57 PM	PH3 valve closed
12/7/2011	4:51:57 PM	SiCl4 pre valve closed
12/7/2011	4:51:57 PM	SiCl4 post valve closed
12/7/2011	4:51:57 PM	Bypass valve closed
12/7/2011	4:51:57 PM	Bubbler valve closed
12/7/2011	4:51:57 PM	Helium valve opened
12/7/2011	4:51:57 PM	Main Vac valve opened
12/7/2011	4:51:57 PM	Helium MFC set to  20.000000
12/7/2011	4:51:57 PM	H2 MFC set to  0.000000
12/7/2011	4:51:57 PM	BCl3 MFC set to  0.000000
12/7/2011	4:51:57 PM	PHl3 MFC set to  0.000000
12/7/2011	4:51:57 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:51:57 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:51:57 PM	Tube furnace set to 150
12/7/2011	4:52:27 PM	Helium valve closed
12/7/2011	4:52:27 PM	H2 valve closed
12/7/2011	4:52:27 PM	BCl3 valve closed
12/7/2011	4:52:27 PM	PH3 valve closed
12/7/2011	4:52:27 PM	SiCl4 pre valve closed
12/7/2011	4:52:27 PM	SiCl4 post valve closed
12/7/2011	4:52:27 PM	Bypass valve closed
12/7/2011	4:52:27 PM	Bubbler valve closed
12/7/2011	4:52:27 PM	Main Vac valve opened
12/7/2011	4:52:27 PM	Helium MFC set to  0.000000
12/7/2011	4:52:27 PM	H2 MFC set to  0.000000
12/7/2011	4:52:27 PM	BCl3 MFC set to  0.000000
12/7/2011	4:52:27 PM	PHl3 MFC set to  0.000000
12/7/2011	4:52:27 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:52:27 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:52:27 PM	Tube furnace set to 150
12/7/2011	4:52:57 PM	H2 valve closed
12/7/2011	4:52:57 PM	BCl3 valve closed
12/7/2011	4:52:57 PM	PH3 valve closed
12/7/2011	4:52:57 PM	SiCl4 pre valve closed
12/7/2011	4:52:57 PM	SiCl4 post valve closed
12/7/2011	4:52:57 PM	Bypass valve closed
12/7/2011	4:52:57 PM	Bubbler valve closed
12/7/2011	4:52:57 PM	Helium valve opened
12/7/2011	4:52:57 PM	Main Vac valve opened
12/7/2011	4:52:57 PM	Helium MFC set to  20.000000
12/7/2011	4:52:57 PM	H2 MFC set to  0.000000
12/7/2011	4:52:57 PM	BCl3 MFC set to  0.000000
12/7/2011	4:52:57 PM	PHl3 MFC set to  0.000000
12/7/2011	4:52:57 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:52:57 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:52:57 PM	Tube furnace set to 150
12/7/2011	4:53:27 PM	Helium valve closed
12/7/2011	4:53:27 PM	H2 valve closed
12/7/2011	4:53:27 PM	BCl3 valve closed
12/7/2011	4:53:27 PM	PH3 valve closed
12/7/2011	4:53:27 PM	SiCl4 pre valve closed
12/7/2011	4:53:27 PM	SiCl4 post valve closed
12/7/2011	4:53:27 PM	Bypass valve closed
12/7/2011	4:53:27 PM	Bubbler valve closed
12/7/2011	4:53:27 PM	Main Vac valve opened
12/7/2011	4:53:27 PM	Helium MFC set to  0.000000
12/7/2011	4:53:27 PM	H2 MFC set to  0.000000
12/7/2011	4:53:27 PM	BCl3 MFC set to  0.000000
12/7/2011	4:53:27 PM	PHl3 MFC set to  0.000000
12/7/2011	4:53:27 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:53:27 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:53:27 PM	Tube furnace set to 150
12/7/2011	4:53:57 PM	H2 valve closed
12/7/2011	4:53:57 PM	BCl3 valve closed
12/7/2011	4:53:57 PM	PH3 valve closed
12/7/2011	4:53:57 PM	SiCl4 pre valve closed
12/7/2011	4:53:57 PM	SiCl4 post valve closed
12/7/2011	4:53:57 PM	Bypass valve closed
12/7/2011	4:53:57 PM	Bubbler valve closed
12/7/2011	4:53:57 PM	Helium valve opened
12/7/2011	4:53:57 PM	Main Vac valve opened
12/7/2011	4:53:57 PM	Helium MFC set to  20.000000
12/7/2011	4:53:57 PM	H2 MFC set to  0.000000
12/7/2011	4:53:57 PM	BCl3 MFC set to  0.000000
12/7/2011	4:53:57 PM	PHl3 MFC set to  0.000000
12/7/2011	4:53:57 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:53:57 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:53:57 PM	Tube furnace set to 150
12/7/2011	4:54:27 PM	Helium valve closed
12/7/2011	4:54:27 PM	H2 valve closed
12/7/2011	4:54:28 PM	BCl3 valve closed
12/7/2011	4:54:28 PM	PH3 valve closed
12/7/2011	4:54:28 PM	SiCl4 pre valve closed
12/7/2011	4:54:28 PM	SiCl4 post valve closed
12/7/2011	4:54:28 PM	Bypass valve closed
12/7/2011	4:54:28 PM	Bubbler valve closed
12/7/2011	4:54:28 PM	Main Vac valve opened
12/7/2011	4:54:28 PM	Helium MFC set to  0.000000
12/7/2011	4:54:28 PM	H2 MFC set to  0.000000
12/7/2011	4:54:28 PM	BCl3 MFC set to  0.000000
12/7/2011	4:54:28 PM	PHl3 MFC set to  0.000000
12/7/2011	4:54:28 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:54:28 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:54:28 PM	Tube furnace set to 150
12/7/2011	4:54:58 PM	H2 valve closed
12/7/2011	4:54:58 PM	BCl3 valve closed
12/7/2011	4:54:58 PM	PH3 valve closed
12/7/2011	4:54:58 PM	SiCl4 pre valve closed
12/7/2011	4:54:58 PM	SiCl4 post valve closed
12/7/2011	4:54:58 PM	Bypass valve closed
12/7/2011	4:54:58 PM	Bubbler valve closed
12/7/2011	4:54:58 PM	Helium valve opened
12/7/2011	4:54:58 PM	Main Vac valve opened
12/7/2011	4:54:58 PM	Helium MFC set to  20.000000
12/7/2011	4:54:58 PM	H2 MFC set to  0.000000
12/7/2011	4:54:58 PM	BCl3 MFC set to  0.000000
12/7/2011	4:54:58 PM	PHl3 MFC set to  0.000000
12/7/2011	4:54:58 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:54:58 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:54:58 PM	Tube furnace set to 150
12/7/2011	4:55:28 PM	Helium valve closed
12/7/2011	4:55:28 PM	H2 valve closed
12/7/2011	4:55:28 PM	BCl3 valve closed
12/7/2011	4:55:28 PM	PH3 valve closed
12/7/2011	4:55:28 PM	SiCl4 pre valve closed
12/7/2011	4:55:28 PM	SiCl4 post valve closed
12/7/2011	4:55:28 PM	Bypass valve closed
12/7/2011	4:55:28 PM	Bubbler valve closed
12/7/2011	4:55:28 PM	Main Vac valve opened
12/7/2011	4:55:28 PM	Helium MFC set to  0.000000
12/7/2011	4:55:28 PM	H2 MFC set to  0.000000
12/7/2011	4:55:28 PM	BCl3 MFC set to  0.000000
12/7/2011	4:55:28 PM	PHl3 MFC set to  0.000000
12/7/2011	4:55:28 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:55:28 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:55:28 PM	Tube furnace set to 150
12/7/2011	4:55:58 PM	H2 valve closed
12/7/2011	4:55:58 PM	BCl3 valve closed
12/7/2011	4:55:58 PM	PH3 valve closed
12/7/2011	4:55:58 PM	SiCl4 pre valve closed
12/7/2011	4:55:58 PM	SiCl4 post valve closed
12/7/2011	4:55:58 PM	Bypass valve closed
12/7/2011	4:55:58 PM	Bubbler valve closed
12/7/2011	4:55:58 PM	Helium valve opened
12/7/2011	4:55:58 PM	Main Vac valve opened
12/7/2011	4:55:58 PM	Helium MFC set to  20.000000
12/7/2011	4:55:58 PM	H2 MFC set to  0.000000
12/7/2011	4:55:58 PM	BCl3 MFC set to  0.000000
12/7/2011	4:55:58 PM	PHl3 MFC set to  0.000000
12/7/2011	4:55:58 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:55:58 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:55:58 PM	Tube furnace set to 150
12/7/2011	4:56:28 PM	Helium valve closed
12/7/2011	4:56:28 PM	H2 valve closed
12/7/2011	4:56:28 PM	BCl3 valve closed
12/7/2011	4:56:28 PM	PH3 valve closed
12/7/2011	4:56:28 PM	SiCl4 pre valve closed
12/7/2011	4:56:28 PM	SiCl4 post valve closed
12/7/2011	4:56:28 PM	Bypass valve closed
12/7/2011	4:56:28 PM	Bubbler valve closed
12/7/2011	4:56:28 PM	Main Vac valve opened
12/7/2011	4:56:28 PM	Helium MFC set to  0.000000
12/7/2011	4:56:28 PM	H2 MFC set to  0.000000
12/7/2011	4:56:28 PM	BCl3 MFC set to  0.000000
12/7/2011	4:56:28 PM	PHl3 MFC set to  0.000000
12/7/2011	4:56:28 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:56:28 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:56:28 PM	Tube furnace set to 150
12/7/2011	4:56:58 PM	H2 valve closed
12/7/2011	4:56:58 PM	BCl3 valve closed
12/7/2011	4:56:58 PM	PH3 valve closed
12/7/2011	4:56:58 PM	SiCl4 pre valve closed
12/7/2011	4:56:58 PM	SiCl4 post valve closed
12/7/2011	4:56:58 PM	Bypass valve closed
12/7/2011	4:56:58 PM	Bubbler valve closed
12/7/2011	4:56:58 PM	Helium valve opened
12/7/2011	4:56:58 PM	Main Vac valve opened
12/7/2011	4:56:58 PM	Helium MFC set to  20.000000
12/7/2011	4:56:58 PM	H2 MFC set to  0.000000
12/7/2011	4:56:58 PM	BCl3 MFC set to  0.000000
12/7/2011	4:56:58 PM	PHl3 MFC set to  0.000000
12/7/2011	4:56:58 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:56:58 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:56:59 PM	Tube furnace set to 150
12/7/2011	4:57:29 PM	Helium valve closed
12/7/2011	4:57:29 PM	H2 valve closed
12/7/2011	4:57:29 PM	BCl3 valve closed
12/7/2011	4:57:29 PM	PH3 valve closed
12/7/2011	4:57:29 PM	SiCl4 pre valve closed
12/7/2011	4:57:29 PM	SiCl4 post valve closed
12/7/2011	4:57:29 PM	Bypass valve closed
12/7/2011	4:57:29 PM	Bubbler valve closed
12/7/2011	4:57:29 PM	Main Vac valve opened
12/7/2011	4:57:29 PM	Helium MFC set to  0.000000
12/7/2011	4:57:29 PM	H2 MFC set to  0.000000
12/7/2011	4:57:29 PM	BCl3 MFC set to  0.000000
12/7/2011	4:57:29 PM	PHl3 MFC set to  0.000000
12/7/2011	4:57:29 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:57:29 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:57:29 PM	Tube furnace set to 150
12/7/2011	4:57:59 PM	H2 valve closed
12/7/2011	4:57:59 PM	BCl3 valve closed
12/7/2011	4:57:59 PM	PH3 valve closed
12/7/2011	4:57:59 PM	SiCl4 pre valve closed
12/7/2011	4:57:59 PM	SiCl4 post valve closed
12/7/2011	4:57:59 PM	Bypass valve closed
12/7/2011	4:57:59 PM	Bubbler valve closed
12/7/2011	4:57:59 PM	Helium valve opened
12/7/2011	4:57:59 PM	Main Vac valve opened
12/7/2011	4:57:59 PM	Helium MFC set to  20.000000
12/7/2011	4:57:59 PM	H2 MFC set to  0.000000
12/7/2011	4:57:59 PM	BCl3 MFC set to  0.000000
12/7/2011	4:57:59 PM	PHl3 MFC set to  0.000000
12/7/2011	4:57:59 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:57:59 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:57:59 PM	Tube furnace set to 150
12/7/2011	4:58:29 PM	Helium valve closed
12/7/2011	4:58:29 PM	H2 valve closed
12/7/2011	4:58:29 PM	BCl3 valve closed
12/7/2011	4:58:29 PM	PH3 valve closed
12/7/2011	4:58:29 PM	SiCl4 pre valve closed
12/7/2011	4:58:29 PM	SiCl4 post valve closed
12/7/2011	4:58:29 PM	Bypass valve closed
12/7/2011	4:58:29 PM	Bubbler valve closed
12/7/2011	4:58:29 PM	Main Vac valve opened
12/7/2011	4:58:29 PM	Helium MFC set to  0.000000
12/7/2011	4:58:29 PM	H2 MFC set to  0.000000
12/7/2011	4:58:29 PM	BCl3 MFC set to  0.000000
12/7/2011	4:58:29 PM	PHl3 MFC set to  0.000000
12/7/2011	4:58:29 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:58:29 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:58:29 PM	Tube furnace set to 150
12/7/2011	4:58:59 PM	H2 valve closed
12/7/2011	4:58:59 PM	BCl3 valve closed
12/7/2011	4:58:59 PM	PH3 valve closed
12/7/2011	4:58:59 PM	SiCl4 pre valve closed
12/7/2011	4:58:59 PM	SiCl4 post valve closed
12/7/2011	4:58:59 PM	Bypass valve closed
12/7/2011	4:58:59 PM	Bubbler valve closed
12/7/2011	4:58:59 PM	Helium valve opened
12/7/2011	4:58:59 PM	Main Vac valve opened
12/7/2011	4:58:59 PM	Helium MFC set to  20.000000
12/7/2011	4:58:59 PM	H2 MFC set to  0.000000
12/7/2011	4:58:59 PM	BCl3 MFC set to  0.000000
12/7/2011	4:58:59 PM	PHl3 MFC set to  0.000000
12/7/2011	4:58:59 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:58:59 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:58:59 PM	Tube furnace set to 150
12/7/2011	4:59:29 PM	Helium valve closed
12/7/2011	4:59:29 PM	H2 valve closed
12/7/2011	4:59:29 PM	BCl3 valve closed
12/7/2011	4:59:29 PM	PH3 valve closed
12/7/2011	4:59:29 PM	SiCl4 pre valve closed
12/7/2011	4:59:29 PM	SiCl4 post valve closed
12/7/2011	4:59:29 PM	Bypass valve closed
12/7/2011	4:59:29 PM	Bubbler valve closed
12/7/2011	4:59:29 PM	Main Vac valve opened
12/7/2011	4:59:29 PM	Helium MFC set to  0.000000
12/7/2011	4:59:29 PM	H2 MFC set to  0.000000
12/7/2011	4:59:29 PM	BCl3 MFC set to  0.000000
12/7/2011	4:59:29 PM	PHl3 MFC set to  0.000000
12/7/2011	4:59:29 PM	SiCl4 MFC set to  0.000000
12/7/2011	4:59:29 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	4:59:30 PM	Tube furnace set to 150
12/7/2011	5:00:00 PM	H2 valve closed
12/7/2011	5:00:00 PM	BCl3 valve closed
12/7/2011	5:00:00 PM	PH3 valve closed
12/7/2011	5:00:00 PM	SiCl4 pre valve closed
12/7/2011	5:00:00 PM	SiCl4 post valve closed
12/7/2011	5:00:00 PM	Bypass valve closed
12/7/2011	5:00:00 PM	Bubbler valve closed
12/7/2011	5:00:00 PM	Helium valve opened
12/7/2011	5:00:00 PM	Main Vac valve opened
12/7/2011	5:00:00 PM	Helium MFC set to  20.000000
12/7/2011	5:00:00 PM	H2 MFC set to  0.000000
12/7/2011	5:00:00 PM	BCl3 MFC set to  0.000000
12/7/2011	5:00:00 PM	PHl3 MFC set to  0.000000
12/7/2011	5:00:00 PM	SiCl4 MFC set to  0.000000
12/7/2011	5:00:00 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	5:00:00 PM	Tube furnace set to 150
12/7/2011	5:00:30 PM	Helium valve closed
12/7/2011	5:00:30 PM	H2 valve closed
12/7/2011	5:00:30 PM	BCl3 valve closed
12/7/2011	5:00:30 PM	PH3 valve closed
12/7/2011	5:00:30 PM	SiCl4 pre valve closed
12/7/2011	5:00:30 PM	SiCl4 post valve closed
12/7/2011	5:00:30 PM	Bypass valve closed
12/7/2011	5:00:30 PM	Bubbler valve closed
12/7/2011	5:00:30 PM	Main Vac valve opened
12/7/2011	5:00:30 PM	Helium MFC set to  0.000000
12/7/2011	5:00:30 PM	H2 MFC set to  0.000000
12/7/2011	5:00:30 PM	BCl3 MFC set to  0.000000
12/7/2011	5:00:30 PM	PHl3 MFC set to  0.000000
12/7/2011	5:00:30 PM	SiCl4 MFC set to  0.000000
12/7/2011	5:00:30 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	5:00:30 PM	Tube furnace set to 150
12/7/2011	5:01:00 PM	H2 valve closed
12/7/2011	5:01:00 PM	BCl3 valve closed
12/7/2011	5:01:00 PM	PH3 valve closed
12/7/2011	5:01:00 PM	SiCl4 pre valve closed
12/7/2011	5:01:00 PM	SiCl4 post valve closed
12/7/2011	5:01:00 PM	Bypass valve closed
12/7/2011	5:01:00 PM	Bubbler valve closed
12/7/2011	5:01:00 PM	Helium valve opened
12/7/2011	5:01:00 PM	Main Vac valve opened
12/7/2011	5:01:00 PM	Helium MFC set to  20.000000
12/7/2011	5:01:00 PM	H2 MFC set to  0.000000
12/7/2011	5:01:00 PM	BCl3 MFC set to  0.000000
12/7/2011	5:01:00 PM	PHl3 MFC set to  0.000000
12/7/2011	5:01:00 PM	SiCl4 MFC set to  0.000000
12/7/2011	5:01:00 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	5:01:00 PM	Tube furnace set to 150
12/7/2011	5:01:30 PM	Helium valve closed
12/7/2011	5:01:30 PM	H2 valve closed
12/7/2011	5:01:30 PM	BCl3 valve closed
12/7/2011	5:01:30 PM	PH3 valve closed
12/7/2011	5:01:30 PM	SiCl4 pre valve closed
12/7/2011	5:01:30 PM	SiCl4 post valve closed
12/7/2011	5:01:30 PM	Bypass valve closed
12/7/2011	5:01:30 PM	Bubbler valve closed
12/7/2011	5:01:30 PM	Main Vac valve opened
12/7/2011	5:01:30 PM	Helium MFC set to  0.000000
12/7/2011	5:01:30 PM	H2 MFC set to  0.000000
12/7/2011	5:01:30 PM	BCl3 MFC set to  0.000000
12/7/2011	5:01:30 PM	PHl3 MFC set to  0.000000
12/7/2011	5:01:30 PM	SiCl4 MFC set to  0.000000
12/7/2011	5:01:30 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	5:01:30 PM	Tube furnace set to 150
12/7/2011	5:01:31 PM	Run finished at 5:01 PM
12/7/2011	6:02:15 PM	Recipe started at 6:02 PM
12/7/2011	6:02:15 PM	Helium valve closed
12/7/2011	6:02:15 PM	H2 valve closed
12/7/2011	6:02:15 PM	BCl3 valve closed
12/7/2011	6:02:15 PM	PH3 valve closed
12/7/2011	6:02:15 PM	SiCl4 pre valve closed
12/7/2011	6:02:15 PM	SiCl4 post valve closed
12/7/2011	6:02:15 PM	Main Vac valve closed
12/7/2011	6:02:15 PM	Bypass valve closed
12/7/2011	6:02:15 PM	Bubbler valve closed
12/7/2011	6:02:15 PM	Helium MFC set to  0.000000
12/7/2011	6:02:15 PM	H2 MFC set to  0.000000
12/7/2011	6:02:15 PM	BCl3 MFC set to  0.000000
12/7/2011	6:02:15 PM	PHl3 MFC set to  0.000000
12/7/2011	6:02:15 PM	SiCl4 MFC set to  0.000000
12/7/2011	6:02:15 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	6:02:15 PM	Tube furnace set to 0
12/7/2011	6:02:18 PM	Helium valve closed
12/7/2011	6:02:18 PM	BCl3 valve closed
12/7/2011	6:02:18 PM	PH3 valve closed
12/7/2011	6:02:18 PM	SiCl4 pre valve closed
12/7/2011	6:02:18 PM	SiCl4 post valve closed
12/7/2011	6:02:18 PM	Main Vac valve closed
12/7/2011	6:02:18 PM	Bypass valve closed
12/7/2011	6:02:18 PM	Bubbler valve closed
12/7/2011	6:02:18 PM	H2 valve opened
12/7/2011	6:02:18 PM	Helium MFC set to  0.000000
12/7/2011	6:02:18 PM	H2 MFC set to  500.000000
12/7/2011	6:02:18 PM	BCl3 MFC set to  0.000000
12/7/2011	6:02:18 PM	PHl3 MFC set to  0.000000
12/7/2011	6:02:18 PM	SiCl4 MFC set to  0.000000
12/7/2011	6:02:18 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	6:02:19 PM	Tube furnace set to 50
12/7/2011	6:03:22 PM	Helium valve closed
12/7/2011	6:03:22 PM	BCl3 valve closed
12/7/2011	6:03:22 PM	PH3 valve closed
12/7/2011	6:03:22 PM	SiCl4 pre valve closed
12/7/2011	6:03:22 PM	SiCl4 post valve closed
12/7/2011	6:03:22 PM	Main Vac valve closed
12/7/2011	6:03:22 PM	Bypass valve closed
12/7/2011	6:03:22 PM	H2 valve opened
12/7/2011	6:03:22 PM	Bubbler valve opened
12/7/2011	6:03:22 PM	Helium MFC set to  0.000000
12/7/2011	6:03:22 PM	H2 MFC set to  500.000000
12/7/2011	6:03:22 PM	BCl3 MFC set to  0.000000
12/7/2011	6:03:22 PM	PHl3 MFC set to  0.000000
12/7/2011	6:03:22 PM	SiCl4 MFC set to  0.000000
12/7/2011	6:03:22 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	6:03:22 PM	Tube furnace set to 50
12/7/2011	6:03:23 PM	Helium valve closed
12/7/2011	6:03:23 PM	BCl3 valve closed
12/7/2011	6:03:23 PM	PH3 valve closed
12/7/2011	6:03:23 PM	SiCl4 pre valve closed
12/7/2011	6:03:23 PM	SiCl4 post valve closed
12/7/2011	6:03:23 PM	Main Vac valve closed
12/7/2011	6:03:23 PM	Bypass valve closed
12/7/2011	6:03:23 PM	H2 valve opened
12/7/2011	6:03:23 PM	Bubbler valve opened
12/7/2011	6:03:23 PM	Helium MFC set to  0.000000
12/7/2011	6:03:23 PM	H2 MFC set to  500.000000
12/7/2011	6:03:23 PM	BCl3 MFC set to  0.000000
12/7/2011	6:03:23 PM	PHl3 MFC set to  0.000000
12/7/2011	6:03:23 PM	SiCl4 MFC set to  0.000000
12/7/2011	6:03:24 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	6:03:24 PM	Tube furnace set to 1000
12/7/2011	6:26:24 PM	Helium valve closed
12/7/2011	6:26:24 PM	BCl3 valve closed
12/7/2011	6:26:24 PM	Main Vac valve closed
12/7/2011	6:26:24 PM	Bypass valve closed
12/7/2011	6:26:24 PM	H2 valve opened
12/7/2011	6:26:24 PM	PH3 valve opened
12/7/2011	6:26:24 PM	SiCl4 pre valve opened
12/7/2011	6:26:24 PM	SiCl4 post valve opened
12/7/2011	6:26:24 PM	Bubbler valve opened
12/7/2011	6:26:24 PM	Helium MFC set to  0.000000
12/7/2011	6:26:24 PM	H2 MFC set to  495.000000
12/7/2011	6:26:24 PM	BCl3 MFC set to  0.000000
12/7/2011	6:26:24 PM	PHl3 MFC set to  0.700000
12/7/2011	6:26:24 PM	SiCl4 MFC set to  25.000000
12/7/2011	6:26:24 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	6:26:24 PM	Tube furnace set to 1000
12/7/2011	6:46:24 PM	Helium valve closed
12/7/2011	6:46:24 PM	BCl3 valve closed
12/7/2011	6:46:24 PM	PH3 valve closed
12/7/2011	6:46:24 PM	SiCl4 pre valve closed
12/7/2011	6:46:24 PM	SiCl4 post valve closed
12/7/2011	6:46:24 PM	Main Vac valve closed
12/7/2011	6:46:24 PM	Bypass valve closed
12/7/2011	6:46:24 PM	H2 valve opened
12/7/2011	6:46:24 PM	Bubbler valve opened
12/7/2011	6:46:24 PM	Helium MFC set to  0.000000
12/7/2011	6:46:24 PM	H2 MFC set to  480.000000
12/7/2011	6:46:24 PM	BCl3 MFC set to  0.000000
12/7/2011	6:46:24 PM	PHl3 MFC set to  0.000000
12/7/2011	6:46:24 PM	SiCl4 MFC set to  0.000000
12/7/2011	6:46:24 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	6:46:24 PM	Tube furnace set to 750
12/7/2011	6:56:24 PM	H2 valve closed
12/7/2011	6:56:24 PM	BCl3 valve closed
12/7/2011	6:56:24 PM	PH3 valve closed
12/7/2011	6:56:24 PM	SiCl4 pre valve closed
12/7/2011	6:56:24 PM	SiCl4 post valve closed
12/7/2011	6:56:24 PM	Main Vac valve closed
12/7/2011	6:56:24 PM	Bypass valve closed
12/7/2011	6:56:24 PM	Helium valve opened
12/7/2011	6:56:24 PM	Bubbler valve opened
12/7/2011	6:56:24 PM	Helium MFC set to  400.000000
12/7/2011	6:56:24 PM	H2 MFC set to  0.000000
12/7/2011	6:56:24 PM	BCl3 MFC set to  0.000000
12/7/2011	6:56:24 PM	PHl3 MFC set to  0.000000
12/7/2011	6:56:24 PM	SiCl4 MFC set to  0.000000
12/7/2011	6:56:24 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	6:56:24 PM	Tube furnace set to 0
12/7/2011	7:21:24 PM	Helium valve closed
12/7/2011	7:21:24 PM	H2 valve closed
12/7/2011	7:21:24 PM	BCl3 valve closed
12/7/2011	7:21:24 PM	PH3 valve closed
12/7/2011	7:21:24 PM	SiCl4 pre valve closed
12/7/2011	7:21:24 PM	SiCl4 post valve closed
12/7/2011	7:21:24 PM	Main Vac valve closed
12/7/2011	7:21:24 PM	Bypass valve closed
12/7/2011	7:21:24 PM	Bubbler valve closed
12/7/2011	7:21:24 PM	Helium MFC set to  0.000000
12/7/2011	7:21:24 PM	H2 MFC set to  0.000000
12/7/2011	7:21:24 PM	BCl3 MFC set to  0.000000
12/7/2011	7:21:24 PM	PHl3 MFC set to  0.000000
12/7/2011	7:21:24 PM	SiCl4 MFC set to  0.000000
12/7/2011	7:21:24 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	7:21:24 PM	Tube furnace set to 50
12/7/2011	7:26:24 PM	Helium valve closed
12/7/2011	7:26:24 PM	H2 valve closed
12/7/2011	7:26:24 PM	BCl3 valve closed
12/7/2011	7:26:24 PM	PH3 valve closed
12/7/2011	7:26:24 PM	SiCl4 pre valve closed
12/7/2011	7:26:24 PM	SiCl4 post valve closed
12/7/2011	7:26:24 PM	Main Vac valve closed
12/7/2011	7:26:24 PM	Bubbler valve closed
12/7/2011	7:26:24 PM	Bypass valve opened
12/7/2011	7:26:24 PM	Helium MFC set to  0.000000
12/7/2011	7:26:24 PM	H2 MFC set to  0.000000
12/7/2011	7:26:24 PM	BCl3 MFC set to  0.000000
12/7/2011	7:26:24 PM	PHl3 MFC set to  0.000000
12/7/2011	7:26:24 PM	SiCl4 MFC set to  0.000000
12/7/2011	7:26:24 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	7:26:24 PM	Tube furnace set to 0
12/7/2011	7:31:25 PM	Helium valve closed
12/7/2011	7:31:25 PM	H2 valve closed
12/7/2011	7:31:25 PM	BCl3 valve closed
12/7/2011	7:31:25 PM	PH3 valve closed
12/7/2011	7:31:25 PM	SiCl4 pre valve closed
12/7/2011	7:31:25 PM	SiCl4 post valve closed
12/7/2011	7:31:25 PM	Bypass valve closed
12/7/2011	7:31:25 PM	Bubbler valve closed
12/7/2011	7:31:25 PM	Main Vac valve opened
12/7/2011	7:31:25 PM	Helium MFC set to  0.000000
12/7/2011	7:31:25 PM	H2 MFC set to  0.000000
12/7/2011	7:31:25 PM	BCl3 MFC set to  0.000000
12/7/2011	7:31:25 PM	PHl3 MFC set to  0.000000
12/7/2011	7:31:25 PM	SiCl4 MFC set to  0.000000
12/7/2011	7:31:25 PM	Bypass solenoid MFC set to  0.000000
12/7/2011	7:31:25 PM	Tube furnace set to 0
12/7/2011	7:31:26 PM	Run finished at 7:31 PM
